| 5317615 |
Exposure apparatus |
Ryuichi Ebinuma, Nobutoshi Mizusawa, Takao Kariya, Shigeyuki Suda, Takayuki Hasegawa |
1994-05-31 |
| 5285488 |
Exposure apparatus |
Yutaka Watanabe, Ryuichi Ebinuma, Nobutoshi Mizusawa, Takao Kariya |
1994-02-08 |
| 5277539 |
Substrate conveying apparatus |
Shin Matsui, Takao Kariya, Nobutoshi Mizusawa, Ryuichi Ebinuma |
1994-01-11 |
| 5276725 |
Exposure system |
Eigo Kawakami, Minoru Yoshii |
1994-01-04 |
| 5231291 |
Wafer table and exposure apparatus with the same |
Mitsuaki Amemiya, Eiji Sakamoto, Koji Uda, Kunitaka Ozawa, Kazunori Iwamoto +1 more |
1993-07-27 |
| 5226523 |
Conveying apparatus and method of controlling the same |
Eigo Kawakami, Koji Uda, Kunitaka Ozawa, Mitsutoshi Kuno, Kazunori Iwamoto +1 more |
1993-07-13 |
| 5182615 |
Exposure apparatus |
Hiroshi Kurosawa, Koji Uda, Kunitaka Ozawa, Nobutoshi Mizusawa, Shigeyuki Suda +2 more |
1993-01-26 |
| 5172403 |
X-ray exposure apparatus |
Yutaka Tanaka, Nobutoshi Mizusawa, Takao Kariya, Mitsuaki Amemiya |
1992-12-15 |
| 5172402 |
Exposure apparatus |
Nobutoshi Mizusawa, Ryuichi Ebinuma, Hiroshi Kurosawa, Koji Uda, Takao Kariya |
1992-12-15 |
| 5168512 |
Method of manufacture of semiconductor devices |
Kazunori Iwamoto, Nobutoshi Mizusawa, Takao Kariya, Ryuichi Ebinuma |
1992-12-01 |
| 5161176 |
Exposure apparatus |
Ryuichi Ebinuma, Kunitaka Ozawa, Takao Kariya, Noriyuki Nose |
1992-11-03 |
| 5160961 |
Substrate holding device |
Mitsuji Marumo, Kazunori Iwamoto, Nobutoshi Mizusawa, Takao Kariya |
1992-11-03 |
| 5159621 |
X-ray transmitting window and method of mounting the same |
Yutaka Watanabe, Yasuaki Fukuda, Nobutoshi Mizusawa, Ryuichi Ebinuma, Mitsuaki Amemiya |
1992-10-27 |
| 5157700 |
Exposure apparatus for controlling intensity of exposure radiation |
Hiroshi Kurosawa, Mitsuaki Amemiya, Shigeru Terashima, Koji Uda, Isamu Shimoda +6 more |
1992-10-20 |
| 5155523 |
Workpiece supporting mechanism |
Shinichi Hara |
1992-10-13 |
| 5150391 |
Exposure apparatus |
Ryuichi Ebinuma, Nobutoshi Mizusawa, Takao Kariya, Shigeyuki Suda |
1992-09-22 |
| 5142156 |
Alignment method for printing a pattern of an original onto different surface areas of a substrate |
Kunitaka Ozawa, Hirohisa Ohta, Makiko Mori, Noriyuki Nose |
1992-08-25 |
| 5138643 |
Exposure apparatus |
Eiji Sakamoto, Ryuichi Ebinuma, Mitsuaki Amemiya, Koji Uda |
1992-08-11 |
| 5131022 |
Exposure method and apparatus |
Shigeru Terashima, Mitsuaki Amemiya, Isamu Shimoda, Takao Kariya |
1992-07-14 |
| 5128975 |
X-ray exposure system |
Kazunori Iwamoto, Takao Kariya, Ryuichi Ebinuma |
1992-07-07 |
| 5125014 |
X-ray exposure apparatus |
Yutaka Watanabe, Shinichiro Uno, Ryuichi Ebinuma, Nobutoshi Mitzusawa |
1992-06-23 |
| 5112133 |
Alignment system |
Hiroshi Kurosawa, Koji Uda, Kunitaka Ozawa, Ryuichi Ebinuma, Takao Kariya |
1992-05-12 |
| 5063582 |
Liquid cooled X-ray lithographic exposure apparatus |
Tetsuzo Mori, Eiji Sakamoto, Shinichi Hara, Koji Uda, Isamu Shimoda +1 more |
1991-11-05 |
| 5008703 |
Exposure apparatus and control of the same |
Eigo Kawakami, Kunitaka Ozawa, Koji Uda, Isamu Shimoda |
1991-04-16 |
| 5001734 |
SOR exposure system |
Koji Uda, Yutaka Tanaka, Tetsuzo Mori, Isamu Shimoda |
1991-03-19 |
