Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12097652 | Imprint apparatus and method for manufacturing article | Takahiro Nakayama, Yoichi Matsuoka | 2024-09-24 |
| 11745410 | Imprint apparatus and method for manufacturing article | Takahiro Nakayama, Yoichi Matsuoka | 2023-09-05 |
| 11036149 | Imprint apparatus, method of operating the same, and method of manufacturing article | Yoichi Matsuoka, Kiyohito Yamamoto, Hisanobu Azuma, Toshihiro Maeda, Masami Yonekawa +2 more | 2021-06-15 |
| 8980533 | Supply apparatus which supplies radicals, lithography apparatus, and method of manufacturing article | — | 2015-03-17 |
| 8686378 | Charged particle beam drawing apparatus, and method of manufacturing article | — | 2014-04-01 |
| 8665415 | Exposure apparatus and device manufacturing method | Takahiro Nakayama, Yutaka Watanabe | 2014-03-04 |
| 8563950 | Energy beam drawing apparatus and method of manufacturing device | Takahiro Nakayama | 2013-10-22 |
| 8004657 | Exposure apparatus, control method for the same, and device manufacturing method | Masayuki Tanabe, Yutaka Watanabe, Mika Kanehira | 2011-08-23 |
| 7738076 | Exposure apparatus and device manufacturing method | Noriyasu Hasegawa | 2010-06-15 |
| 7724348 | Exposure apparatus and method, and device manufacturing method | Yoshio Gomei, Hiromitsu Takase | 2010-05-25 |
| 7566422 | Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatus | Shinichi Hara, Yutaka Tanaka, Takayuki Hasegawa, Shin Matsui | 2009-07-28 |
| 7212273 | Exposure apparatus and method of producing device | — | 2007-05-01 |
| 7123343 | Exposure apparatus and device manufacturing method | Noriyasu Hasegawa | 2006-10-17 |
| 7050152 | Exposure apparatus | Noriyasu Hasegawa | 2006-05-23 |
| 7027131 | Exposure apparatus | — | 2006-04-11 |
| 6984362 | Processing apparatus, measuring apparatus, and device manufacturing method | Shinichi Hara, Yutaka Tanaka, Takayuki Hasegawa, Shin Matsui | 2006-01-10 |
| 6954255 | Exposure apparatus | Noriyasu Hasegawa | 2005-10-11 |
| 6934003 | Exposure apparatus and device manufacturing method | Noriyasu Hasegawa, Eiji Sakamoto | 2005-08-23 |
| 6750946 | Processing apparatus for processing sample in predetermined atmosphere | Yutaka Tanaka, Shinichi Hara | 2004-06-15 |
| 6721031 | Exposure apparatus | Noriyasu Hasegawa | 2004-04-13 |
| 6721032 | Exposure apparatus and control method therefor, and device manufacturing method | Noriyasu Hasegawa | 2004-04-13 |
| 6616898 | Processing apparatus with pressure control and gas recirculation system | Shinichi Hara, Yutaka Tanaka, Takayuki Hasegawa, Shin Matsui | 2003-09-09 |
| 6603833 | X-ray exposure apparatus | Yutaka Watanabe | 2003-08-05 |
| 6463119 | Exposure method, exposure apparatus and semiconductor manufacturing apparatus | Takeshi Miyachi, Yutaka Watanabe, Kazuyuki Kasumi | 2002-10-08 |
| 6453000 | Exposure method, exposure device and semiconductor device manufacturing method | Hideki Ina | 2002-09-17 |