Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8921807 | In situ cleaning device for lithographic apparatus | Ichiro Tanaka, Akira Miyake | 2014-12-30 |
| 8698095 | Charged particle beam drawing apparatus and article manufacturing method | Ichiro Tanaka, Akira Miyake | 2014-04-15 |
| 8149378 | Cleaning apparatus for exposure apparatus and exposure apparatus | Hideki Morishima, Takahiro Sasaki | 2012-04-03 |
| 7724348 | Exposure apparatus and method, and device manufacturing method | Yoshio Gomei, Shigeru Terashima | 2010-05-25 |
| 7416462 | Glass substrate processing method and material removal process using x-ray fluorescence | Takashi Noma, Toyoko Kobayashi, Taiko Motoi, Naoko Miura, Shin Kobayashi | 2008-08-26 |
| 7208276 | Probe carrier and method for analyzing the probe carrier | Tadashi Okamoto, Toshiaki Aiba, Hiroyuki Hashimoto | 2007-04-24 |
| 7188031 | Method for acquiring information of a biochip using time of flight secondary ion mass spectrometry and an apparatus for acquiring information for the application thereof | Tadashi Okamoto, Hiroyuki Hashimoto | 2007-03-06 |
| 6951494 | Spacer recovery method and apparatus used during disassembling of an image display apparatus | Takashi Noma, Toyoko Kobayashi, Taiko Motoi, Naoko Miura, Shin Kobayashi | 2005-10-04 |
| 6632113 | Image display apparatus, disassembly processing method therefor, and component recovery method | Takashi Noma, Toyoko Kobayashi, Taiko Motoi, Naoko Miura, Shin Kobayashi | 2003-10-14 |
| 6366014 | Charge-up suppressing member, charge-up suppressing film, electron beam apparatus, and image forming apparatus | Kazuo Kuroda, Hiroshi Takagi, Takao Kusaka, Noriaki Ohguri | 2002-04-02 |