Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6328865 | Method for forming a thin film of a composite metal compound and apparatus for carrying out the method | Shigeharu Matsumoto, Kazuo Kikuchi, Masafumi Yamasaki, Qi Tang | 2001-12-11 |
| 6207536 | Method for forming a thin film of a composite metal compound and apparatus for carrying out the method | Shigeharu Matsumoto, Kazuo Kikuchi, Masafumi Yamasaki, Qi Tang | 2001-03-27 |
| 5433988 | Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray | Yasuaki Fukuda, Yutaka Watanabe, Takashi Iizuka | 1995-07-18 |
| 5310603 | Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray | Yasuaki Fukuda, Yutaka Watanabe, Takashi Iizuka | 1994-05-10 |
| 5153898 | X-ray reduction projection exposure system of reflection type | Masayuki Suzuki, Noritaka Mochizuki, Setsuo Minami, Yasuaki Fukuda, Yutaka Watanabe +2 more | 1992-10-06 |
| 5052033 | Reflection type mask | Tsutomu Ikeda, Yutaka Watanabe, Masayuki Suzuki, Masami Hayashida, Yasuaki Fukuda +2 more | 1991-09-24 |
| 5012500 | X-ray mask support member, X-ray mask, and X-ray exposure process using the X-ray mask | Yutaka Watanabe, Yasuaki Fukuda | 1991-04-30 |
| 4856861 | Light waveguide lens | Mamoru Miyawaki, Kazuya Matsumoto | 1989-08-15 |
| 4707059 | Integrated optical circuit element and method of making the same | Yuichi Handa | 1987-11-17 |
| 4637684 | Method of making an optical coupler device utilizing volatile liquid to achieve optical contact | Yasuo Tomita, Kazuya Matsumoto | 1987-01-20 |
| 4531138 | Liquid jet recording method and apparatus | Ichiro Endo, Shigeru Ohno | 1985-07-23 |