Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5848119 | Illumination system and exposure apparatus having the same | Akira Miyake | 1998-12-08 |
| 5641593 | Lithographic mask and exposure apparatus using the same | Yutaka Watanabe | 1997-06-24 |
| 5549994 | Exposure apparatus and reflection type mask to be used in the same | Yutaka Watanabe | 1996-08-27 |
| 5461657 | X-ray mirror, and x-ray exposure apparatus and device manufacturing method employing the same | Yutaka Watanabe | 1995-10-24 |
| 5444753 | X-ray lithography mask, light exposure apparatus and process therefore | Yutaka Watanabe | 1995-08-22 |
| 5390228 | Method of and apparatus for stabilizing shapes of objects, such as optical elements, as well as exposure apparatus using same and method of manufacturing semiconductor devices | Masahito Niibe, Yasuaki Fukuda | 1995-02-14 |
| 5335259 | X-ray exposure apparatus | Yasuaki Fukuda, Yutaka Watanabe | 1994-08-02 |
| 5204887 | X-ray microscope | Yutaka Watanabe, Masahito Niibe, Takashi Iizuka, Yasuaki Fukuda | 1993-04-20 |
| 5145649 | Apparatus for cleaning an optical element for use with a radiation beam | Takashi Iizuka, Yasuaki Fukuda, Masahito Niibe | 1992-09-08 |
| 5052033 | Reflection type mask | Tsutomu Ikeda, Yutaka Watanabe, Masayuki Suzuki, Yasuaki Fukuda, Shigetaro Ogura +2 more | 1991-09-24 |