Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7771065 | Optical unit and exposure apparatus having the same | Choshoku Sai, Katsumi Asada, Hirohito Ito, Shinji Uchida | 2010-08-10 |
| 7535552 | Moving/guiding apparatus and exposure apparatus using the same | — | 2009-05-19 |
| 7453623 | Reflecting mirror and exposure apparatus using the same | Shinji Uchida, Choshoku Sai, Katsumi Asada, Hirohito Ito | 2008-11-18 |
| 7443619 | Optical element holding apparatus, exposure apparatus and device manufacturing method | Hirohito Ito, Shinji Uchida, Choshoku Sai, Katsumi Asada | 2008-10-28 |
| 6644855 | Stage device, exposure apparatus, device manufacturing method and movement guidance method | Mitsuru Inoue, Tadayuki Kubo | 2003-11-11 |
| 6244702 | Method and apparatus for producing color filter, color filter, liquid crystal display device and apparatus having the liquid crystal display device | Kazuaki Masuda, Shinsuke Tsuruoka, Toshikazu Sakai | 2001-06-12 |
| 5984470 | Apparatus for producing color filter with alignment error detection | Kazuaki Masuda, Shinsuke Tsuruoka, Toshikazu Sakai | 1999-11-16 |
| 5228358 | Motion guiding device | Eiji Osanai | 1993-07-20 |
| 5040431 | Movement guiding mechanism | Eiji Osanai, Mahito Negishi, Michio Horikoshi, Mitsuru Inoue, Kazuya Ono | 1991-08-20 |
| 4744675 | Moving mechanism | Mahito Negishi, Koichi Matsushita, Michio Horikoshi, Makoto Higomura | 1988-05-17 |