| 7198141 |
Shock absorbing apparatus in a positioning apparatus |
Takeshi Sasaki |
2007-04-03 |
| 7184129 |
Positioning method, and positioning apparatus |
— |
2007-02-27 |
| 6644855 |
Stage device, exposure apparatus, device manufacturing method and movement guidance method |
Shigeo Sakino, Mitsuru Inoue |
2003-11-11 |
| 6408045 |
Stage system and exposure apparatus with the same |
Shin Matsui, Shinji Ohishi, Eiji Osanai |
2002-06-18 |
| 5317221 |
Linear driving device |
Kazuo Watanabe, Michio Horikoshi |
1994-05-31 |
| 5280677 |
Positioning mechanism |
Eiji Osanai |
1994-01-25 |
| 5142172 |
Rectilinear-motion driving device for voice coil motor |
Michio Horikoshi, Kazuo Watanabe |
1992-08-25 |
| 4204482 |
Comparator circuit adapted for use in a system for controlling the air-fuel ratio of an internal combustion engine |
Toshiro Harada, Kazusato Kasuya, Yukihiro Watanabe |
1980-05-27 |
