Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6408045 | Stage system and exposure apparatus with the same | Shin Matsui, Shinji Ohishi, Tadayuki Kubo | 2002-06-18 |
| 6285444 | Positioning system and position measuring method for use in exposure apparatus | Kotaro Akutsu | 2001-09-04 |
| 6028376 | Positioning apparatus and exposure apparatus using the same | Kotaro Akutsu, Hirohito Ito | 2000-02-22 |
| 5939852 | Stage feeding device | Kotaro Akutsu, Hirohito Ito | 1999-08-17 |
| 5933215 | Exposure apparatus and device manufacturing method using the same | Mitsuru Inoue, Ryuichi Ebinuma, Kazunori Iwamoto, Hiroaki Takeishi | 1999-08-03 |
| 5909272 | Stage and exposure apparatus using same | Mitsuru Inoue, Kazunori Iwamoto, Katsumi Asada, Hiroshi Ito | 1999-06-01 |
| 5864389 | Stage apparatus and exposure apparatus and device producing method using the same | Kotaro Akutsu | 1999-01-26 |
| 5858587 | Positioning system and method and apparatus for device manufacture | Yukio Yamane, Kotaro Akutsu | 1999-01-12 |
| 5717482 | Stage apparatus and method of mounting a substrate on a substrate holding surface of a substrate chuck in which a substrate is mounted in a Z-axis direction | Kotarao Akutsu | 1998-02-10 |
| 5701041 | Weight supporting apparatus | Kotaro Akutsu, Shigeto Kamata | 1997-12-23 |
| 5610686 | Exposure apparatus including an antivibration control system | — | 1997-03-11 |
| 5524502 | Positioning apparatus including a hydrostatic bearing for spacing apart a supporting surface and a guide surface | — | 1996-06-11 |
| 5376988 | Parallel-moving apparatus and lens moving device in an exposing apparatus using the same | — | 1994-12-27 |
| 5280677 | Positioning mechanism | Tadayuki Kubo | 1994-01-25 |
| 5228358 | Motion guiding device | Shigeo Sakino | 1993-07-20 |
| 5062020 | Recording and reproducing apparatus | — | 1991-10-29 |
| 5040431 | Movement guiding mechanism | Shigeo Sakino, Mahito Negishi, Michio Horikoshi, Mitsuru Inoue, Kazuya Ono | 1991-08-20 |
| 4814922 | Recording and reproducing apparatus using flexible disc | — | 1989-03-21 |