Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11097880 | Packaging container | — | 2021-08-24 |
| 10934624 | Laminated film | Tetsuya Suzuki, Yuya Futagami, Akira Shirakura | 2021-03-02 |
| 10522370 | Substrate processing apparatus | Sang Hyun Park, Jung-Jae Kim | 2019-12-31 |
| 10423070 | Substrate treating method | Masashi Kanaoka, Masanori IMAMURA, Taiji Matsu, Hidetoshi Sagawa, Atsushi Tanaka +3 more | 2019-09-24 |
| 10048597 | Exposure apparatus and device fabrication method | — | 2018-08-14 |
| 9829801 | Exposure apparatus and device fabrication method | — | 2017-11-28 |
| 9563133 | Exposure apparatus and device fabrication method | — | 2017-02-07 |
| 9312159 | Transport apparatus and exposure apparatus | — | 2016-04-12 |
| 8928856 | Exposure apparatus and device fabrication method | — | 2015-01-06 |
| 8228484 | Coupling apparatus, exposure apparatus, and device fabricating method | Yuichi Shibazaki | 2012-07-24 |
| 8120751 | Coupling apparatus, exposure apparatus, and device fabricating method | Yuichi Shibazaki | 2012-02-21 |
| 7619715 | Coupling apparatus, exposure apparatus, and device fabricating method | Yuichi Shibazaki | 2009-11-17 |
| 7201971 | Paper packaging material for liquid food and method for production thereof | Peter Frisk, Hiroaki Ogita | 2007-04-10 |
| 7149932 | Serial communication device and method of carrying out serial communication | — | 2006-12-12 |
| 7088423 | Edge exposing apparatus | Kazuya Akiyama, Kenji Kamei | 2006-08-08 |
| 6927838 | Multiple stage, stage assembly having independent stage bases | Douglas C. Watson, Andrew J. Hazelton | 2005-08-09 |
| 6906334 | Curved I-core | — | 2005-06-14 |
| 6750625 | Wafer stage with magnetic bearings | Michael Binnard, Andrew J. Hazelton | 2004-06-15 |
| 6724466 | Stage assembly including a damping assembly | Andrew J. Hazelton | 2004-04-20 |
| 6666002 | Filling machine provided with flushing device | Yuzo Otsuka | 2003-12-23 |
| 6590355 | Linear motor device, stage device, and exposure apparatus | Toshihide Kikuchi, Masahiro Totsu, Yutaka Uda | 2003-07-08 |
| 6522388 | Vibration eliminator, exposure apparatus and projection exposure method | Masato Takahashi | 2003-02-18 |
| 6333572 | Article positioning apparatus and exposing apparatus having the article positioning apparatus | — | 2001-12-25 |
| 6323567 | Circulating system for shaft-type linear motors | Andrew J. Hazelton | 2001-11-27 |
| 6283041 | Table support apparatus and exposure apparatus | — | 2001-09-04 |