YU

Yutaka Uda

NI Nikon: 4 patents #874 of 2,493Top 40%
Overall (All Time): #1,261,321 of 4,157,543Top 35%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6857950 Polishing apparatus, semiconductor device manufacturing method using the polishing apparatus, and semiconductor device manufactured by the manufacturing method Yutaka Hayashi 2005-02-22
6590355 Linear motor device, stage device, and exposure apparatus Toshihide Kikuchi, Masahiro Totsu, Kazuya Ono 2003-07-08
6121867 Electrical coil assembly having a plurality of coils arranged in pairs Toshihide Kikuchi 2000-09-19
6002320 Electrical coil assembly having a plurality of coils arranged in pairs Toshihide Kikuchi 1999-12-14