Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6857950 | Polishing apparatus, semiconductor device manufacturing method using the polishing apparatus, and semiconductor device manufactured by the manufacturing method | Yutaka Hayashi | 2005-02-22 |
| 6590355 | Linear motor device, stage device, and exposure apparatus | Toshihide Kikuchi, Masahiro Totsu, Kazuya Ono | 2003-07-08 |
| 6121867 | Electrical coil assembly having a plurality of coils arranged in pairs | Toshihide Kikuchi | 2000-09-19 |
| 6002320 | Electrical coil assembly having a plurality of coils arranged in pairs | Toshihide Kikuchi | 1999-12-14 |