Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6590355 | Linear motor device, stage device, and exposure apparatus | Masahiro Totsu, Kazuya Ono, Yutaka Uda | 2003-07-08 |
| 6121867 | Electrical coil assembly having a plurality of coils arranged in pairs | Yutaka Uda | 2000-09-19 |
| 6002320 | Electrical coil assembly having a plurality of coils arranged in pairs | Yutaka Uda | 1999-12-14 |