Issued Patents All Time
Showing 25 most recent of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346029 | Curved reticle by mechanical and phase bending along orthogonal axes | Donis Flagello, Daniel Gene Smith, Stephen P. Renwick | 2025-07-01 |
| 12303975 | Analyzer system for aligning and focusing an energy beam in a three-dimensional printer | — | 2025-05-20 |
| 12203745 | Metrology for additive manufacturing | Eric Peter Goodwin, Heather Lynn Durko, Daniel Gene Smith, Johnathan Agustin Marquez, Patrick Shih Chang +4 more | 2025-01-21 |
| 12151378 | Vibration reduction system for precision robotics applications | Yoon Jung Jeong, Alton H. Phillips | 2024-11-26 |
| 12066677 | Balanced active stabilizers | Yoon Jung Jeong, Alton H. Phillips, Matthew Parker-McCormick Bjork | 2024-08-20 |
| 12055193 | Vibration isolation systems with reaction masses and actuators | Alton H. Phillips, Yoon Jung Jeong, Matthew Parker-McCormick Bjork | 2024-08-06 |
| 11982521 | Measurement of a change in a geometrical characteristic and/or position of a workpiece | Daniel Gene Smith | 2024-05-14 |
| 11300884 | Illumination system with curved 1d-patterned mask for use in EUV-exposure tool | Daniel Gene Smith, David M. Williamson, Donis Flagello | 2022-04-12 |
| 11099483 | Euv lithography system for dense line patterning | Donis Flagello, David M. Williamson, Stephen P. Renwick, Daniel Gene Smith | 2021-08-24 |
| 11075573 | Power minimizing controller for a stage assembly | Neyram Hemati | 2021-07-27 |
| 11067900 | Dense line extreme ultraviolet lithography system with distortion matching | — | 2021-07-20 |
| 11061338 | High-resolution position encoder with image sensor and encoded target pattern | Jonathan K. Wells, Paul Derek Coon, Matthew Rosa, Johnathan Agustin Marquez, Steven Douglas Slonaker +3 more | 2021-07-13 |
| 10890849 | EUV lithography system for dense line patterning | Donis Flagello, David M. Williamson, Stephen P. Renwick, Daniel Gene Smith | 2021-01-12 |
| 10884344 | Positioning system using surface pattern recognition and interpolation | Paul Derek Coon, Jonathan K. Wells, Matthew Rosa | 2021-01-05 |
| 10747117 | Extreme ultraviolet lithography system that utilizes pattern stitching | Daniel Gene Smith, David M. Williamson | 2020-08-18 |
| 10712671 | Dense line extreme ultraviolet lithography system with distortion matching | — | 2020-07-14 |
| 10394138 | System and method for control of a workpiece and a chuck | Paul Derek Coon | 2019-08-27 |
| 10295911 | Extreme ultraviolet lithography system that utilizes pattern stitching | Daniel Gene Smith, David M. Williamson | 2019-05-21 |
| 10254654 | Microelectromechanical mirror assembly | Shane R. Palmer | 2019-04-09 |
| 10084364 | Power minimizing controller for a stage assembly | Neyram Hemati | 2018-09-25 |
| 10078269 | Array of encoders for alignment measurement | Eric Peter Goodwin, Ruslan Kurdyumov | 2018-09-18 |
| 9946163 | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | — | 2018-04-17 |
| 9921495 | Magnetic sensor calibration and servo for planar motor stage | Pai-Hsueh Yang, J. Kyle Wells, Chetan Mahadeswaraswamy, Tsutomu Ogiwara | 2018-03-20 |
| 9874817 | Microelectromechanical mirror assembly | Shane R. Palmer | 2018-01-23 |
| 9778579 | System and method for controlling a temperature of a reaction assembly | Michel Pharand, Chetan Mahadeswaraswamy | 2017-10-03 |