Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086231 | Array description system for large patterns | — | 2021-08-10 |
| 10840103 | Forced grid method for correcting mask patterns for a pattern transfer apparatus | — | 2020-11-17 |
| 10416562 | Increasing and controlling sensitivity of non-linear metallic thin-film resists | — | 2019-09-17 |
| 10310387 | Dynamic patterning method that removes phase conflicts and improves pattern fidelity and CDU on a two phase-pixelated digital scanner | Julia A. Sakamoto, Donis Flagello | 2019-06-04 |
| 10254654 | Microelectromechanical mirror assembly | Michael Binnard | 2019-04-09 |
| 9874817 | Microelectromechanical mirror assembly | Michael Binnard | 2018-01-23 |
| 9690198 | Increasing and controlling sensitivity of non-linear metallic thin-film resists | — | 2017-06-27 |
| 8588508 | Method or matching high-numerical aperture scanners | Donis Flagello | 2013-11-19 |
| 8507262 | Apparatus and method for monitoring cultures | Edmund Kunji | 2013-08-13 |
| 8305559 | Exposure apparatus that utilizes multiple masks | David M. Williamson | 2012-11-06 |
| 7735056 | Automated circuit design dimension change responsive to low contrast condition determination in photomask phase pattern | Thomas J. Aton, Carl A. Vickery | 2010-06-08 |
| 6634018 | Optical proximity correction | John N. Randall, Thomas J. Aton | 2003-10-14 |
| 6553558 | Integrated circuit layout and verification method | John N. Randall, Thomas J. Aton | 2003-04-22 |
| 6342420 | Hexagonally symmetric integrated circuit cell | Akitoshi Nishimura, Yasutoshi Okuno, Rajesh Khamankar | 2002-01-29 |
| 6166408 | Hexagonally symmetric integrated circuit cell | Akitoshi Nishimura, Yasutoshi Okuno, Rajesh Khamankar | 2000-12-26 |
| 5539567 | Photolithographic technique and illuminator using real-time addressable phase shift light shift | Tsen-Hwang Lin, Steven C. Gustafson, Jay Brown | 1996-07-23 |
| 5539568 | Method of exposing a light sensitive material | Tsen-Hwang Lin, Steven C. Gustafson, Jay Brown | 1996-07-23 |
| 5442184 | System and method for semiconductor processing using polarized radiant energy | Gong Chen | 1995-08-15 |
| 5306584 | Mask or wafer writing technique | — | 1994-04-26 |
| 4973381 | Method and apparatus for etching surface with excited gas | — | 1990-11-27 |