High-resolution position encoder with image sensor and encoded target pattern

Assignee

• Nikon

Inventors

• Jonathan K. Wells (5 patents)
• Paul Derek Coon (11 patents)
• Matthew Rosa (7 patents)
• Johnathan Agustin Marquez (5 patents)
• Michael Binnard (86 patents)
• Steven Douglas Slonaker (7 patents)
• Daniel Gene Smith (50 patents)
• Stephen P. Renwick (12 patents)
• Brett William Herr (2 patents)

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