Issued Patents All Time
Showing 25 most recent of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346029 | Curved reticle by mechanical and phase bending along orthogonal axes | Donis Flagello, Michael Binnard, Stephen P. Renwick | 2025-07-01 |
| 12203745 | Metrology for additive manufacturing | Eric Peter Goodwin, Heather Lynn Durko, Johnathan Agustin Marquez, Michael Binnard, Patrick Shih Chang +4 more | 2025-01-21 |
| 12104891 | Spatially filtered talbot interferometer for wafer distortion measurement | Goldie Goldstein, Hidemitsu Toba, Shunsuke Kibayashi, Katsura Otaki, Eric Peter Goodwin | 2024-10-01 |
| 11982521 | Measurement of a change in a geometrical characteristic and/or position of a workpiece | Michael Binnard | 2024-05-14 |
| 11934105 | Optical objective for operation in EUV spectral region | David M. Williamson | 2024-03-19 |
| 11578969 | Optical assembly, method for producing data in the same, and method for manufacturing structure | — | 2023-02-14 |
| 11300884 | Illumination system with curved 1d-patterned mask for use in EUV-exposure tool | David M. Williamson, Donis Flagello, Michael Binnard | 2022-04-12 |
| 11099483 | Euv lithography system for dense line patterning | Donis Flagello, David M. Williamson, Stephen P. Renwick, Michael Binnard | 2021-08-24 |
| 11061338 | High-resolution position encoder with image sensor and encoded target pattern | Jonathan K. Wells, Paul Derek Coon, Matthew Rosa, Johnathan Agustin Marquez, Michael Binnard +3 more | 2021-07-13 |
| 11054745 | Illumination system with flat 1D-patterned mask for use in EUV-exposure tool | David M. Williamson | 2021-07-06 |
| 10928187 | Compensation for Goos-Hanchen error in autofocus systems | Eric Peter Goodwin | 2021-02-23 |
| 10890849 | EUV lithography system for dense line patterning | Donis Flagello, David M. Williamson, Stephen P. Renwick, Michael Binnard | 2021-01-12 |
| 10837763 | Optical assembly, method for producing data in the same, and method for manufacturing structure | — | 2020-11-17 |
| 10794689 | Autofocus system and method | Eric Peter Goodwin | 2020-10-06 |
| 10747117 | Extreme ultraviolet lithography system that utilizes pattern stitching | Michael Binnard, David M. Williamson | 2020-08-18 |
| 10719017 | Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror | Eric Peter Goodwin | 2020-07-21 |
| 10690317 | Illumination device for optimizing polarization in an illumination pupil | Michael Sogard | 2020-06-23 |
| 10295911 | Extreme ultraviolet lithography system that utilizes pattern stitching | Michael Binnard, David M. Williamson | 2019-05-21 |
| 10197668 | Eighth wave corner cube retarder for laser radar | — | 2019-02-05 |
| 10180496 | Laser radar with remote local oscillator | Eric Peter Goodwin, Anthony R. Slotwinski, Mina Rezk, Alexander Cooper, Thomas M. Hedges | 2019-01-15 |
| 10139492 | Radar systems with dual fiber coupled lasers | Mina Rezk, Anthony R. Slotwinski, Eric Peter Goodwin, Alexander Cooper, Thomas M. Hedges | 2018-11-27 |
| 9977343 | Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror | Eric Peter Goodwin | 2018-05-22 |
| 9964745 | Compact laser radar corner cube | — | 2018-05-08 |
| 9864204 | High order focus in laser radar tooling ball measurements | — | 2018-01-09 |
| 9816805 | Compensation for Goos-Hanchen error in autofocus systems | Eric Peter Goodwin | 2017-11-14 |