Issued Patents All Time
Showing 25 most recent of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11313758 | Apparatus and methods for measuring thermally induced reticle distortion | — | 2022-04-26 |
| 10690317 | Illumination device for optimizing polarization in an illumination pupil | Daniel Gene Smith | 2020-06-23 |
| 10612997 | Apparatus and methods for measuring thermally induced reticle distortion | — | 2020-04-07 |
| 10466045 | Fluid gauges comprising multiple differential pressure sensors | — | 2019-11-05 |
| 10054754 | Thermal regulation of vibration-sensitive objects with conduit circuit having liquid metal, pump, and heat exchanger | — | 2018-08-21 |
| 9976930 | Apparatus and methods for measuring thermally induced reticle distortion | — | 2018-05-22 |
| 9977350 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2018-05-22 |
| 9732934 | Illumination device for optimizing polarization in an illumination pupil | Daniel Gene Smith | 2017-08-15 |
| 9658537 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2017-05-23 |
| 9529282 | Position-measurement systems | Motofusa Ishikawa | 2016-12-27 |
| 9513460 | Apparatus and methods for reducing autofocus error | — | 2016-12-06 |
| 9423704 | Apparatus and methods for measuring thermally induced reticle distortion | — | 2016-08-23 |
| 9335159 | Methods and devices for reducing errors in Goos-Hänchen corrections of displacement data | Daniel Gene Smith, David M. Williamson | 2016-05-10 |
| 9244362 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2016-01-26 |
| 9244363 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2016-01-26 |
| 9097851 | System and method for compensating instability in an autofocus system | Eric Peter Goodwin, Daniel Gene Smith | 2015-08-04 |
| 8994918 | Apparatus and methods for measuring thermally induced reticle distortion | — | 2015-03-31 |
| 8852858 | Methods and devices for hybridization and binding assays using thermophoresis | — | 2014-10-07 |
| 8842296 | Methods and devices for reducing errors in Goos-Hänchen corrections of displacement data | Daniel Gene Smith, David M. Williamson | 2014-09-23 |
| 8836914 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2014-09-16 |
| 8810768 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2014-08-19 |
| 8767174 | Temperature-controlled holding devices for planar articles | Alton H. Phillips, Douglas C. Watson | 2014-07-01 |
| 8717542 | Fluid gauge with multiple reference gaps | — | 2014-05-06 |
| 8711335 | Stroboscopic light source for a transmitter of a large scale metrology system | — | 2014-04-29 |
| 8593779 | Hybrid electrostatic chuck | — | 2013-11-26 |