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High-resolution position encoder with image sensor and encoded target pattern |
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EUV lithography system for dense line patterning |
Donis Flagello, David M. Williamson, Daniel Gene Smith, Michael Binnard |
2021-01-12 |
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Spatial-frequency matched wafer alignment marks, wafer alignment and overlay measurement and processing using multiple different mark designs on a single layer |
Steven Douglas Slonaker |
2020-12-22 |
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Determining a physical location of a wireless mobile device |
Kieran Gerard Anthony Boland, Telemaque Ndizihiwe, Mark E. Wallace |
2015-07-07 |
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Counteracting spam in voice over internet protocol telephony systems |
Kieran Gerard Anthony Boland, Telemaque Ndizihiwe, Mark E. Wallace |
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Determining a physical location of a wireless mobile device |
Kieran Gerard Anthony Boland, Telemaque Ndizihiwe, Mark E. Wallace |
2014-06-17 |
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Method, system and software tool for processing an electronic form |
Michael Desmond, Maire Kehoe, Mark E. Wallace |
2013-05-21 |
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Systems and methods for adjusting a lithographic scanner |
Koichi Fujii |
2013-05-07 |
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System and method for an adjusting optical proximity effect for an exposure apparatus |
Steven Douglas Slonaker |
2012-10-30 |
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Method to diagnose imperfections in illuminator of a lithographic tool |
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