Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104891 | Spatially filtered talbot interferometer for wafer distortion measurement | Daniel Gene Smith, Goldie Goldstein, Hidemitsu Toba, Shunsuke Kibayashi, Eric Peter Goodwin | 2024-10-01 |
| 10571340 | Method and device for measuring wavefront using diffraction grating, and exposure method and device | Katsumi Sugisaki, Takashi Gemma | 2020-02-25 |
| 10288489 | Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction | Katsumi Sugisaki, Takashi Gemma | 2019-05-14 |
| 8807978 | Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing method | Soichi Owa | 2014-08-19 |