Issued Patents All Time
Showing 1–25 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119411 | Drive method for spatial light modulator, method for generating pattern for exposure, and exposure method and apparatus | Yoji Watanabe | 2021-09-14 |
| 10877383 | Temperature controlled heat transfer frame for pellicle | Paul Derek Coon | 2020-12-29 |
| 10768341 | Optical material, optical element and method for manufacturing same | Shunji Watanabe, Junji Suzuki, Kazuhiro Kido, Hidemitsu Toba | 2020-09-08 |
| 10761431 | Spatial light modulator, method of driving same, and exposure method and apparatus | Yoji Watanabe, Tomoharu Fujiwara | 2020-09-01 |
| 10527956 | Temperature controlled heat transfer frame for pellicle | Paul Derek Coon | 2020-01-07 |
| 10495977 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Yoji Watanabe, Tomoharu Fujiwara | 2019-12-03 |
| 10338479 | Spatial light modulator, method of driving same, and exposure method and apparatus | Yoji Watanabe, Tomoharu Fujiwara | 2019-07-02 |
| 10261421 | Controller for optical device, exposure method and apparatus, and method for manufacturing device | — | 2019-04-16 |
| 10222705 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Yoji Watanabe, Tomoharu Fujiwara | 2019-03-05 |
| 10054858 | Spatial light modulator, method of driving same, and exposure method and apparatus | Yoji Watanabe, Tomoharu Fujiwara | 2018-08-21 |
| 10048602 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Shigeru Hirukawa, Yasuhiro Omura | 2018-08-14 |
| 10012768 | Optical material, optical element, and method for manufacturing same | Shunji Watanabe, Junji Suzuki, Kazuhiro Kido, Hidemitsu Toba | 2018-07-03 |
| 9946162 | Controller for optical device, exposure method and apparatus, and method for manufacturing device | — | 2018-04-17 |
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2017-12-19 |
| 9651871 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Yoji Watanabe, Tomoharu Fujiwara | 2017-05-16 |
| 9551942 | Controller for optical device, exposure method and apparatus, and method for manufacturing device | — | 2017-01-24 |
| 9316921 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Shigeru Hirukawa, Yasuhiro Omura | 2016-04-19 |
| 9310520 | Optical material, optical element, and method for manufacturing same | Shunji Watanabe, Junji Suzuki, Kazuhiro Kido, Hidemitsu Toba | 2016-04-12 |
| 9291814 | Spatial light modulator, exposure apparatus, and method for manufacturing device | Yoji Watanabe, Tomoharu Fujiwara | 2016-03-22 |
| 9268235 | Controller for optical device, exposure method and apparatus, and method for manufacturing device | — | 2016-02-23 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2016-02-23 |
| 9239525 | Pattern forming method and apparatus, exposure method and apparatus, and device manufacturing method and device | — | 2016-01-19 |
| 9063436 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Ryu Sugawara | 2015-06-23 |
| 9019467 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2015-04-28 |
| 8807978 | Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing method | Katsura Otaki | 2014-08-19 |