Issued Patents All Time
Showing 26–50 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8807978 | Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing method | Katsura Otaki | 2014-08-19 |
| 8795953 | Pattern forming method and method for producing device | Toshikazu Umatate, Tomoharu Fujiwara | 2014-08-05 |
| 8792081 | Controller for optical device, exposure method and apparatus, and method for manufacturing device | — | 2014-07-29 |
| 8780327 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano | 2014-07-15 |
| 8760617 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano | 2014-06-24 |
| 8736809 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasufumi Nishii | 2014-05-27 |
| 8724077 | Exposure apparatus, exposure method, and device manufacturing method | Hiroyuki Nagasaka, Kenichi Shiraishi, Tomoharu Fujiwara, Akihiro Miwa | 2014-05-13 |
| 8698998 | Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device | Hiroyuki Nagasaka, Kenichi Shiraishi, Shigeru Hirukawa | 2014-04-15 |
| 8699116 | Microactuator, optical device, display apparatus, exposure apparatus, and method for producing device | Junji Suzuki | 2014-04-15 |
| 8605252 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Shigeru Hirukawa, Yasuhiro Omura | 2013-12-10 |
| 8570632 | Microactuator, optical device and exposure apparatus, and device manufacturing method | Junji Suzuki | 2013-10-29 |
| 8405816 | Pattern formation method, pattern formation apparatus, exposure method, exposure apparatus, and device manufacturing method | Shigeru Hirukawa | 2013-03-26 |
| 8384877 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano | 2013-02-26 |
| 8384880 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2013-02-26 |
| 8253921 | Exposure apparatus and device fabricating method | Hiroyuki Nagasaka | 2012-08-28 |
| 8208119 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Shigeru Hirukawa, Yasuhiro Omura | 2012-06-26 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hirotaka Kohno +6 more | 2012-06-26 |
| 8174668 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano | 2012-05-08 |
| 8169591 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Ryu Sugawara | 2012-05-01 |
| 8169592 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano | 2012-05-01 |
| 8130363 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano | 2012-03-06 |
| 8102508 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura | 2012-01-24 |
| 8102504 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2012-01-24 |
| 8094290 | Illumination optical apparatus, exposure apparatus, and device manufacturing method | Osamu Tanitsu, Hirohisa Tanaka | 2012-01-10 |
| 8089608 | Exposure apparatus, exposure method, and device manufacturing method | Hiroyuki Nagasaka, Kenichi Shiraishi, Tomoharu Fujiwara, Akihiro Miwa | 2012-01-03 |