Issued Patents All Time
Showing 76–93 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831731 | Projection optical system and an exposure apparatus with the projection optical system | Yasuhiro Omura, Naomasa Shiraishi, Issey Tanaka, Toshihiko Ozawa, Shunsuke Niisaka | 2004-12-14 |
| 6707529 | Exposure method and apparatus | Takashi Aoki, Naomasa Shiraishi | 2004-03-16 |
| 6653024 | Photomask, aberration correction plate, exposure apparatus, and process of production of microdevice | Naomasa Shiraishi, Hitoshi Takeuchi | 2003-11-25 |
| 6614504 | Exposure apparatus, exposure method, and device manufacturing method | Takashi Aoki | 2003-09-02 |
| 6590698 | Ultraviolet laser apparatus and exposure apparatus using same | Tomoko Ohtsuki | 2003-07-08 |
| 6339634 | Soft x-ray light source device | Noriaki Kandaka, Hiroyuki Kondo, Tomoko Ohtsuki | 2002-01-15 |
| 6324203 | Laser light source, illuminating optical device, and exposure device | — | 2001-11-27 |
| 6291145 | Image formation method with photosensitive material | Tadayosi Kokubo, Kazuya Okamoto, Hiroshi Ooki, Masato Shibuya | 2001-09-18 |
| 6088379 | Ultraviolet laser apparatus and semiconductor exposure apparatus | Tomoko Ohtsuki | 2000-07-11 |
| 6078598 | Laser apparatus, pulsed laser oscillation method and projection exposure apparatus using the same | Tomoko Ohtsuki | 2000-06-20 |
| 6049558 | Optical elements for guiding laser light and laser systems comprising same | Masaki Harada, Tomoko Ohtsuki | 2000-04-11 |
| 5902716 | Exposure method and apparatus | Kazuya Okamoto, Hiroshi Ooki, Masato Shibuya | 1999-05-11 |
| 5875031 | Distance measuring device based on laser interference with a baffle structure member | — | 1999-02-23 |
| 5851707 | Microlithography projection-exposure masks, and methods and apparatus employing same | Masato Shibuya, Hiroshi Ooki, Kazuya Okamoto | 1998-12-22 |
| 5847812 | Projection exposure system and method | Hiroshi Ooki, Masato Shibuya, Kazuya Okamoto | 1998-12-08 |
| 5838709 | Ultraviolet laser source | — | 1998-11-17 |
| 5552926 | Device and method for wavelength conversion and BBO crystal for wavelength conversion | Yoichi Taira | 1996-09-03 |
| 5359617 | Nonlinear optical device | Satoru Kano, Kiyoshi Kumata | 1994-10-25 |