Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10353120 | Optical element, projection optical system, exposure apparatus, and device manufacturing method | — | 2019-07-16 |
| 10126660 | Multilayer film reflector, method of manufacturing multilayer film reflector, projection optical system, exposure apparatus, and method of manufacturing device | Katsuhiko Murakami | 2018-11-13 |
| 7706058 | Multilayer mirror, method for manufacturing the same, and exposure equipment | Katsuhiko Murakami, Takaharu Komiya, Masayuki Shiraishi | 2010-04-27 |
| 7440182 | Multilayer mirror, method for manufacturing the same, and exposure equipment | Katsuhiko Murakami, Takaharu Komiya, Masayuki Shiraishi | 2008-10-21 |
| 7382527 | EUV multilayer mirror with phase shifting layer | Katsuhiko Murakami, Takaharu Komiya, Masayuki Shiraishi | 2008-06-03 |
| 6898011 | Multi-layered film reflector manufacturing method | Masaki Yamamoto | 2005-05-24 |
| 6590959 | High-intensity sources of short-wavelength electromagnetic radiation for microlithography and other uses | Hideki Komatsuda | 2003-07-08 |
| 6504903 | Laser-excited plasma light source, exposure apparatus and its making method, and device manufacturing method | Hiroyuki Kondo | 2003-01-07 |
| 6385290 | X-ray apparatus | Hiroyuki Kondo | 2002-05-07 |
| 6339634 | Soft x-ray light source device | Hiroyuki Kondo, Soichi Owa, Tomoko Ohtsuki | 2002-01-15 |
| 6326617 | Photoelectron spectroscopy apparatus | Toshihisa Tomie, Hideaki Shimizu, Hiroyuki Kondo | 2001-12-04 |
| 6324255 | X-ray irradiation apparatus and x-ray exposure apparatus | Hiroyuki Kondo | 2001-11-27 |
| 6285743 | Method and apparatus for soft X-ray generation | Hiroyuki Kondo | 2001-09-04 |