Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8121254 | Optical element, exposure apparatus using this, and device manufacturing method | Katsuhiko Murakami | 2012-02-21 |
| 7706058 | Multilayer mirror, method for manufacturing the same, and exposure equipment | Noriaki Kandaka, Katsuhiko Murakami, Masayuki Shiraishi | 2010-04-27 |
| 7440182 | Multilayer mirror, method for manufacturing the same, and exposure equipment | Noriaki Kandaka, Katsuhiko Murakami, Masayuki Shiraishi | 2008-10-21 |
| 7382527 | EUV multilayer mirror with phase shifting layer | Noriaki Kandaka, Katsuhiko Murakami, Masayuki Shiraishi | 2008-06-03 |