Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7576343 | Method and apparatus for generating laser produced plasma | — | 2009-08-18 |
| 6954266 | Method and apparatus for inspecting multilayer masks for defects | — | 2005-10-11 |
| 6326617 | Photoelectron spectroscopy apparatus | Hideaki Shimizu, Hiroyuki Kondo, Noriaki Kandaka | 2001-12-04 |
| 6275565 | Laser plasma light source and method of generating radiation using the same | — | 2001-08-14 |
| 5781608 | X-ray exposure system | Hideaki Shimizu, Toshikazu Majima | 1998-07-14 |
| 5684852 | X-ray lens | — | 1997-11-04 |
| 5594773 | X-ray lens | — | 1997-01-14 |
| 5569916 | Electron spectroscopy apparatus | — | 1996-10-29 |
| 5293396 | Plasma generating apparatus and method for extreme-ultaviolet laser | — | 1994-03-08 |