Issued Patents All Time
Showing 25 most recent of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105428 | Image-forming optical system, exposure apparatus, and device producing method | — | 2024-10-01 |
| 11934104 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Yoshio Kawabe | 2024-03-19 |
| 11467501 | Image-forming optical system, exposure apparatus, and device producing method | — | 2022-10-11 |
| 11353795 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Yoshio Kawabe | 2022-06-07 |
| 10866522 | Image-forming optical system, exposure apparatus, and device producing method | — | 2020-12-15 |
| 10831106 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Yoshio Kawabe | 2020-11-10 |
| 10459343 | Illumination device | — | 2019-10-29 |
| 10345708 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Yoshio Kawabe | 2019-07-09 |
| 10228623 | Image-forming optical system, exposure apparatus, and device producing method | — | 2019-03-12 |
| 10162269 | Illumination device | — | 2018-12-25 |
| 9939733 | Image-forming optical system, exposure apparatus, and device producing method | — | 2018-04-10 |
| 9760012 | Illumination device | — | 2017-09-12 |
| 9703204 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Yoshio Kawabe | 2017-07-11 |
| 9557548 | Image-forming optical system, exposure apparatus, and device producing method | — | 2017-01-31 |
| 9477156 | Reflecting optical member, optical system, exposure apparatus, and device manufacturing method | Hideo Takino, Tetsuya Tomofuji, Kohtaro Kasashima | 2016-10-25 |
| 9195069 | Illumination optical apparatus, exposure apparatus, and device manufacturing method | Hirohisa Tanaka | 2015-11-24 |
| 8780328 | Illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2014-07-15 |
| 8467032 | Exposure apparatus and electronic device manufacturing method | — | 2013-06-18 |
| 8081296 | Illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2011-12-20 |
| 8023103 | Exposure apparatus, exposure method, and method for producing device | Yuichi Shibazaki | 2011-09-20 |
| 7800734 | Lighting apparatus, exposure apparatus and microdevice manufacturing method | — | 2010-09-21 |
| 7483122 | Projection optical system, exposure apparatus, and exposure method | Tomowaki Takahashi, Masayuki Suzuki | 2009-01-27 |
| 7471456 | Optical integrator, illumination optical device, exposure device, and exposure method | — | 2008-12-30 |
| 7446856 | Illumination systems, exposure apparatus, and microdevice-manufacturing methods using same | — | 2008-11-04 |
| 7312851 | Projection optical system, exposure apparatus, and exposure method in which a reflective projection optical system has a non-circular aperture stop | Tomowaki Takahashi, Masayuki Suzuki | 2007-12-25 |