Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7692767 | Projection optical system and exposure apparatus with the same | — | 2010-04-06 |
| 7630057 | Projection optical system, exposure apparatus, and device manufacturing method | — | 2009-12-08 |
| 7483122 | Projection optical system, exposure apparatus, and exposure method | Hideki Komatsuda, Masayuki Suzuki | 2009-01-27 |
| 7470033 | Reflection-type projection-optical systems, and exposure apparatus comprising same | — | 2008-12-30 |
| 7436589 | Reflective-type projection optical system and exposure apparatus equipped with said reflective-type projection optical system | — | 2008-10-14 |
| 7312851 | Projection optical system, exposure apparatus, and exposure method in which a reflective projection optical system has a non-circular aperture stop | Hideki Komatsuda, Masayuki Suzuki | 2007-12-25 |
| 7283206 | Projection optical system, exposure apparatus, and device manufacturing method | — | 2007-10-16 |
| RE39296 | Catadioptric projection systems | — | 2006-09-19 |
| 7030965 | Catadioptric system and exposure device having this system | — | 2006-04-18 |
| RE39024 | Exposure apparatus having catadioptric projection optical system | — | 2006-03-21 |
| 6867931 | Dual-imaging optical system | — | 2005-03-15 |
| 6781766 | Projection optical system | — | 2004-08-24 |
| 6707616 | Projection exposure apparatus, projection exposure method and catadioptric optical system | Hiroyuki Tsukamoto | 2004-03-16 |
| RE38438 | Catadioptric reduction projection optical system and exposure apparatus having the same | — | 2004-02-24 |
| RE38421 | Exposure apparatus having catadioptric projection optical system | — | 2004-02-10 |
| 6538821 | Projection optical system | — | 2003-03-25 |
| 6392822 | Dual-imaging optical system | — | 2002-05-21 |
| 6302548 | Catoptric reduction projection optical system and exposure apparatus and method using same | Yutaka Suenaga | 2001-10-16 |
| 6213610 | Catoptric reduction projection optical system and exposure apparatus and method using same | Yutaka Suenaga | 2001-04-10 |
| 6172825 | Catoptric reduction projection optical system and projection exposure apparatus and method using same | — | 2001-01-09 |
| 6157498 | Dual-imaging optical system | — | 2000-12-05 |
| 6109756 | Catoptric reduction projection optical system | — | 2000-08-29 |
| 6097537 | Catadioptric optical system | Junichi Misawa | 2000-08-01 |
| 5999333 | Exposure apparatus having catadioptric projection optical system | — | 1999-12-07 |
| 5969882 | Catadioptric optical system | — | 1999-10-19 |