Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9477156 | Reflecting optical member, optical system, exposure apparatus, and device manufacturing method | Tetsuya Tomofuji, Hideki Komatsuda, Kohtaro Kasashima | 2016-10-25 |
| 6984051 | Multifaceted reflecting mirror, illumination optical system based on use of the same, and semiconductor exposure apparatus | — | 2006-01-10 |