Issued Patents All Time
Showing 25 most recent of 230 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12383981 | Processing apparatus, and manufacturing method of movable body | Masayuki Shiraishi, Shigeki EGAMI, Yoshio Kawabe, Yosuke TATSUZAKI | 2025-08-12 |
| 12296404 | Processing apparatus and processing method for removal processing with a light beam and having a workpiece position measurement system | — | 2025-05-13 |
| 12157184 | Processing apparatus, and manufacturing method of movable body | Masayuki Shiraishi, Yoshio Kawabe, Yosuke TATSUZAKI | 2024-12-03 |
| 12121991 | Processing apparatus, and manufacturing method of movable body | Masayuki Shiraishi, Shigeki EGAMI, Yoshio Kawabe, Yosuke TATSUZAKI | 2024-10-22 |
| 12007702 | Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method | — | 2024-06-11 |
| 11977339 | Substrate processing system and substrate processing method, and device manufacturing method | — | 2024-05-07 |
| 11969822 | Processing method and processing system | — | 2024-04-30 |
| 11911844 | Shaping apparatus and shaping method | — | 2024-02-27 |
| 11806810 | Shaping apparatus and shaping method | — | 2023-11-07 |
| 11747736 | Exposure apparatus and exposure method, and device manufacturing method | — | 2023-09-05 |
| 11742299 | Determination method and apparatus, program, information recording medium, exposure apparatus, layout information providing method, layout method, mark detection method, exposure method, and device manufacturing method | — | 2023-08-29 |
| 11691217 | Laser processing device with optical device for changing cross-sectional intensity distribution of a beam at a pupil plane | — | 2023-07-04 |
| 11579532 | Exposure apparatus and exposure method, and device manufacturing method | — | 2023-02-14 |
| 11442371 | Substrate processing system and substrate processing method, and device manufacturing method | — | 2022-09-13 |
| 11435672 | Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method | — | 2022-09-06 |
| 11385557 | Measurement device, lithography system and exposure apparatus, and device manufacturing method | — | 2022-07-12 |
| 11276558 | Exposure apparatus and exposure method, lithography method, and device manufacturing method | — | 2022-03-15 |
| 11274919 | Measurement system, substrate processing system, and device manufacturing method | Go ICHINOSE | 2022-03-15 |
| 11256175 | Exposure apparatus and exposure method, and device manufacturing method | — | 2022-02-22 |
| 11181832 | Movable body apparatus, exposure apparatus, and device manufacturing method | — | 2021-11-23 |
| 11161202 | Shaping apparatus and shaping method | — | 2021-11-02 |
| 11067894 | Exposure method, exposure apparatus, and device manufacturing method | — | 2021-07-20 |
| 10852639 | Exposure apparatus and exposure method, and device manufacturing method | — | 2020-12-01 |
| 10788760 | Movable body apparatus, exposure apparatus, and device manufacturing method | — | 2020-09-29 |
| 10775708 | Substrate processing system and substrate processing method, and device manufacturing method | — | 2020-09-15 |