Issued Patents All Time
Showing 26–50 of 230 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698326 | Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method | — | 2020-06-30 |
| 10684562 | Measurement device, lithography system and exposure apparatus, and device manufacturing method | — | 2020-06-16 |
| 10678152 | Layout method, mark detection method, exposure method, measurement device, exposure apparatus, and device manufacturing method | — | 2020-06-09 |
| 10658157 | Exposure apparatus and exposure method, lithography method, and device manufacturing method | — | 2020-05-19 |
| 10593514 | Charged particle beam irradiation apparatus and device manufacturing method | — | 2020-03-17 |
| 10545407 | Exposure method, exposure apparatus, and device manufacturing method | — | 2020-01-28 |
| 10527944 | Exposure method, exposure apparatus, and device manufacturing method | — | 2020-01-07 |
| 10527943 | Exposure method, exposure apparatus, and device manufacturing method | — | 2020-01-07 |
| 10520828 | Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium | — | 2019-12-31 |
| 10474044 | Movable body apparatus, exposure apparatus, and device manufacturing method | — | 2019-11-12 |
| 10409166 | Exposure apparatus and exposure method, and device manufacturing method | — | 2019-09-10 |
| 10409173 | Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method | — | 2019-09-10 |
| 10401733 | Exposure apparatus, exposure method, and device manufacturing method | — | 2019-09-03 |
| 10359707 | Substrate holding device, exposure apparatus, and device manufacturing method | — | 2019-07-23 |
| 10353302 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2019-07-16 |
| 10353301 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2019-07-16 |
| 10353300 | Movable body apparatus, exposure apparatus, and device manufacturing method | — | 2019-07-16 |
| 10345121 | Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method | — | 2019-07-09 |
| 10338482 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2019-07-02 |
| 10310384 | Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method | — | 2019-06-04 |
| 10289012 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2019-05-14 |
| 10289010 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2019-05-14 |
| 10289007 | Lithography tool having a reticle stage capable of dynamic reticle bending to compensate for distortion | Alton H. Phillips | 2019-05-14 |
| 10274831 | Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method | — | 2019-04-30 |
| 10268126 | Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method | — | 2019-04-23 |