Issued Patents All Time
Showing 76–100 of 230 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9989859 | Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method | — | 2018-06-05 |
| 9983486 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2018-05-29 |
| 9971253 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2018-05-15 |
| 9971246 | Exposure method, exposure apparatus, and device manufacturing method | — | 2018-05-15 |
| 9958792 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2018-05-01 |
| 9946171 | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method | — | 2018-04-17 |
| 9921490 | Substrate holding device, exposure apparatus, and device manufacturing method | — | 2018-03-20 |
| 9915878 | Exposure apparatus, exposure method, and device manufacturing method | — | 2018-03-13 |
| 9910361 | Exposure apparatus, exposure method, and device manufacturing method | — | 2018-03-06 |
| 9891531 | Exposure apparatus and exposure method, and device manufacturing method | — | 2018-02-13 |
| 9874823 | Exposure apparatus, exposure method, and device manufacturing method | — | 2018-01-23 |
| 9874822 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2018-01-23 |
| 9857701 | Exposure apparatus, exposure method, and device manufacturing method | — | 2018-01-02 |
| 9857697 | Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method | — | 2018-01-02 |
| 9846374 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2017-12-19 |
| 9835958 | Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method | — | 2017-12-05 |
| 9810999 | Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium | — | 2017-11-07 |
| 9760021 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2017-09-12 |
| 9740114 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2017-08-22 |
| 9715176 | Exposure apparatus, exposure method, and device manufacturing method | — | 2017-07-25 |
| 9709900 | Exposure apparatus and device fabricating method | Tomoharu Fujiwara | 2017-07-18 |
| 9690214 | Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method | — | 2017-06-27 |
| 9690209 | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method | — | 2017-06-27 |
| 9690205 | Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method | — | 2017-06-27 |
| 9684248 | Lithographic apparatus having substrate table and sensor table to measure a patterned beam | — | 2017-06-20 |