Issued Patents All Time
Showing 126–150 of 230 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9323162 | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method | — | 2016-04-26 |
| 9304412 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and measuring method | Yuho Kanaya | 2016-04-05 |
| 9291917 | Exposure apparatus, exposure method, and device manufacturing method | — | 2016-03-22 |
| 9244367 | Exposure apparatus, exposure method, and device manufacturing method | — | 2016-01-26 |
| 9229333 | Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method | — | 2016-01-05 |
| 9223225 | Liquid immersion member, exposure apparatus, exposure method, and device manufacturing method | — | 2015-12-29 |
| 9207549 | Exposure apparatus and exposure method, and device manufacturing method with encoder of higher reliability for position measurement | — | 2015-12-08 |
| 9164400 | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method | — | 2015-10-20 |
| 9152060 | Stage device with two pairs of movable elements and two pairs of stators, exposure apparatus, and method of manufacturing devices | — | 2015-10-06 |
| 9103700 | Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method | — | 2015-08-11 |
| 9081301 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2015-07-14 |
| 9081305 | Exposure apparatus, exposure method, and device manufacturing method | — | 2015-07-14 |
| 9019472 | Exposure apparatus, exposure method, and device manufacturing method | — | 2015-04-28 |
| 8994924 | Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method | — | 2015-03-31 |
| 8994923 | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method | — | 2015-03-31 |
| 8970820 | Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method | — | 2015-03-03 |
| 8964166 | Stage device, exposure apparatus and method of producing device | — | 2015-02-24 |
| 8947639 | Exposure method and apparatus measuring position of movable body based on information on flatness of encoder grating section | — | 2015-02-03 |
| 8937710 | Exposure method and apparatus compensating measuring error of encoder due to grating section and displacement of movable body in Z direction | — | 2015-01-20 |
| 8922754 | Immersion exposure apparatus and device fabricating method with two substrate stages and metrology station | Tomoharu Fujiwara | 2014-12-30 |
| 8908145 | Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method | — | 2014-12-09 |
| 8902402 | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method | — | 2014-12-02 |
| 8891064 | Moving body apparatus and exposure apparatus | — | 2014-11-18 |
| 8891056 | Stage apparatus and exposure apparatus | — | 2014-11-18 |
| 8867022 | Movable body drive method and movable body drive system, pattern formation method and apparatus, and device manufacturing method | Yuho Kanaya | 2014-10-21 |