Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10209623 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Tadashi Nagayama | 2019-02-19 |
| 9436102 | Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method | — | 2016-09-06 |
| 9383656 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Tadashi Nagayama | 2016-07-05 |
| 9304412 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and measuring method | Yuichi Shibazaki | 2016-04-05 |
| 9256140 | Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z direction | — | 2016-02-09 |
| 9063438 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Tadashi Nagayama | 2015-06-23 |
| 9013681 | Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method | — | 2015-04-21 |
| 8867022 | Movable body drive method and movable body drive system, pattern formation method and apparatus, and device manufacturing method | Yuichi Shibazaki | 2014-10-21 |
| 8817236 | Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method | — | 2014-08-26 |
| 8792086 | Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus | — | 2014-07-29 |
| 8786829 | Exposure apparatus, exposure method, and device manufacturing method | — | 2014-07-22 |
| 8767182 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | Yuichi Shibazaki | 2014-07-01 |
| 8665455 | Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method | — | 2014-03-04 |
| 8582084 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method | Yuichi Shibazaki | 2013-11-12 |
| 8547527 | Movable body drive method and movable body drive system, pattern formation method and pattern formation apparatus, and device manufacturing method | — | 2013-10-01 |
| 8422015 | Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method | — | 2013-04-16 |
| 8243257 | Position measurement system, exposure apparatus, position measuring method, exposure method and device manufacturing method, and tool and measuring method | — | 2012-08-14 |
| 8237919 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of movable body before and after switching between sensor heads | Yuichi Shibazaki | 2012-08-07 |
| 8228482 | Exposure apparatus, exposure method, and device manufacturing method | — | 2012-07-24 |
| 8218129 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, measuring method, and position measurement system | Yuichi Shibazaki | 2012-07-10 |
| 8194232 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method | Yuichi Shibazaki | 2012-06-05 |
| 8130361 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Tadashi Nagayama, Kenichi Shiraishi | 2012-03-06 |
| 8098362 | Detection device, movable body apparatus, pattern formation apparatus and pattern formation method, exposure apparatus and exposure method, and device manufacturing method | — | 2012-01-17 |
| 8085385 | Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus | — | 2011-12-27 |
| 8023106 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | Yuichi Shibazaki | 2011-09-20 |