Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10222708 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2019-03-05 |
| 10209623 | Exposure apparatus, exposure method, and method for producing device | Takahiro Masada, Yuho Kanaya, Tadashi Nagayama | 2019-02-19 |
| 9857692 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2018-01-02 |
| 9383656 | Exposure apparatus, exposure method, and method for producing device | Takahiro Masada, Yuho Kanaya, Tadashi Nagayama | 2016-07-05 |
| 9348238 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2016-05-24 |
| 9298108 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2016-03-29 |
| 9223231 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2015-12-29 |
| 9223230 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2015-12-29 |
| 9063438 | Exposure apparatus, exposure method, and method for producing device | Takahiro Masada, Yuho Kanaya, Tadashi Nagayama | 2015-06-23 |
| 8947665 | Measurement method, measurement apparatus, exposure method, and exposure apparatus | Mitsuru Kobayashi | 2015-02-03 |
| 8576379 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2013-11-05 |
| 8477310 | Measurement method, measurement apparatus, exposure method, and exposure apparatus | Mitsuru Kobayashi | 2013-07-02 |
| 8130361 | Exposure apparatus, exposure method, and method for producing device | Takahiro Masada, Yuho Kanaya, Tadashi Nagayama, Kenichi Shiraishi | 2012-03-06 |
| 8072578 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2011-12-06 |
| 8059260 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2011-11-15 |
| 8054465 | Position measurement method | Taro Sugihara | 2011-11-08 |
| 6888621 | Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method | Yasuo Araki, Noriaki Tokuda, Shinji Mizutani, Hiroaki Narushima | 2005-05-03 |
| 6876946 | Alignment method and apparatus therefor | Osamu Furukawa, Masaharu Kawakubo, Hiroki Tateno, Nobutaka Magome | 2005-04-05 |
| 6641962 | Micro devices manufacturing method utilizing concave and convex alignment mark patterns | Shinji Mizutani, Kazuya Ota | 2003-11-04 |
| 6566022 | Micro devices manufacturing method and apparatus therefor | Shinji Mizutani, Kazuya Ota | 2003-05-20 |
| 6549271 | Exposure apparatus and method | Masahiro Nei, Yuuki Ishii, Tetsuo Taniguchi | 2003-04-15 |
| 6353078 | Polyurethane adhesive, method for use in bonding, and use of mixture | Shigeru Murata, Tetsuya Nakajima | 2002-03-05 |
| 6306548 | Micro devices manufacturing method and apparatus therefor | Shinji Mizutani, Kazuya Ota | 2001-10-23 |
| 6278957 | Alignment method and apparatus therefor | Osamu Furukawa, Masaharu Kawakubo, Hiroki Tateno, Nobutaka Magome | 2001-08-21 |
| 6110021 | Micro devices manufacturing method and apparatus therefor | Kazuya Ota | 2000-08-29 |