Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7266664 | Memory device for controlling nonvolatile and volatile memories | Yoshinobu Higuchi, Keisuke Kanazawa | 2007-09-04 |
| 6888621 | Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method | Yasuo Araki, Noriaki Tokuda, Masahiko Yasuda, Hiroaki Narushima | 2005-05-03 |
| 6641962 | Micro devices manufacturing method utilizing concave and convex alignment mark patterns | Kazuya Ota, Masahiko Yasuda | 2003-11-04 |
| 6566022 | Micro devices manufacturing method and apparatus therefor | Kazuya Ota, Masahiko Yasuda | 2003-05-20 |
| 6306548 | Micro devices manufacturing method and apparatus therefor | Kazuya Ota, Masahiko Yasuda | 2001-10-23 |
| 6184972 | Substrate transport apparatus, substrate holding apparatus and substrate processing apparatus | Hiroaki Narusima | 2001-02-06 |
| 6163366 | Exposure method and apparatus | Hiroki Okamoto, Masaharu Kawakubo | 2000-12-19 |
| 6016186 | Alignment device and method with focus detection system | — | 2000-01-18 |
| 5907405 | Alignment method and exposure system | Nobutaka Magome | 1999-05-25 |
| 5805866 | Alignment method | Nobutaka Magome | 1998-09-08 |
| 5721605 | Alignment device and method with focus detection system | — | 1998-02-24 |
| 5601957 | Micro devices manufacturing method comprising the use of a second pattern overlying an alignment mark to reduce flattening | Kazuya Ota, Masahiko Yasuda | 1997-02-11 |
| 5532091 | Aligning method | — | 1996-07-02 |
| 4753599 | Automotive steering assembly | Sadao Kokubu, Yasuo Miyake | 1988-06-28 |