Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6876946 | Alignment method and apparatus therefor | Masahiko Yasuda, Osamu Furukawa, Masaharu Kawakubo, Nobutaka Magome | 2005-04-05 |
| 6342941 | Exposure apparatus and method preheating a mask before exposing; a conveyance method preheating a mask before exposing; and a device manufacturing system and method manufacturing a device according to the exposure apparatus and method | Masahiro Nei, Kenichiro Kaneko, Jiro Inoue, Naomasa Shiraishi | 2002-01-29 |
| 6278957 | Alignment method and apparatus therefor | Masahiko Yasuda, Osamu Furukawa, Masaharu Kawakubo, Nobutaka Magome | 2001-08-21 |
| 5754300 | Alignment method and apparatus | Nobutaka Magome, Kazuya Ohta | 1998-05-19 |
| 5666205 | Measuring method and exposure apparatus | Koji Kaise, Kyoichi Suwa, Yuji Imai | 1997-09-09 |
| 5596204 | Method for aligning processing areas on a substrate with a predetermined position in a static coordinate system | Nobuyuki Irie, Shigeru Hirukawa | 1997-01-21 |
| 5521036 | Positioning method and apparatus | Yoshichika Iwamoto, Nobutaka Magome, Hiroki Okamoto | 1996-05-28 |
| 5448333 | Exposure method | Yoshichika Iwamoto | 1995-09-05 |
| 4908656 | Method of dimension measurement for a pattern formed by exposure apparatus, and method for setting exposure conditions and for inspecting exposure precision | Kyoichi Suwa, Shigeru Hirukawa | 1990-03-13 |
| 4803524 | Method of and apparatus for detecting the accuracy of superposition exposure in an exposure apparatus | Koichi Ohno, Kenji Higashi | 1989-02-07 |