Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5525808 | Alignment method and alignment apparatus with a statistic calculation using a plurality of weighted coordinate positions | Nobuyuki Irie, Eiji Takane, Shigeru Hirukawa, Ryoichi Kaneko | 1996-06-11 |
| 5521036 | Positioning method and apparatus | Hiroki Tateno, Nobutaka Magome, Hiroki Okamoto | 1996-05-28 |
| 5448333 | Exposure method | Hiroki Tateno | 1995-09-05 |