Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7531923 | Coreless linear motor | Toru Shikayama | 2009-05-12 |
| 7034922 | Exposure apparatus and exposure method | — | 2006-04-25 |
| 7001674 | Exposure method, exposure apparatus, and method of production of device | — | 2006-02-21 |
| 6842225 | Exposure apparatus, microdevice, photomask, method of exposure, and method of production of device | — | 2005-01-11 |
| 6800968 | Linear motor | Toru Shikayama, Yasuhiro Miyamoto | 2004-10-05 |
| 6731029 | Canned linear motor | Toru Shikayama, Shusaku Yoshida, Jianping Yu | 2004-05-04 |
| 6710847 | Exposure method and exposure apparatus | — | 2004-03-23 |
| 6607863 | Exposure method of production of density filter | — | 2003-08-19 |
| 6606145 | Exposure apparatus, microdevice, photomask, and exposure method | Katsuaki Ishimaru | 2003-08-12 |
| 6337162 | Method of exposure, photomask, method of production of photomask, microdevice, and method of production of microdevice | — | 2002-01-08 |
| 6262491 | Control system for hybrid vehicle | Shinichi Kitajima, Atsushi Izumiura, Keisuke Uchida, Katsuhiro Kumagai, Asao Ukai +6 more | 2001-07-17 |
| 6118516 | Projection exposure apparatus having a filter arranged in its projection optical system and method for protecting circuit patterns | Nobutaka Magome, Yasuaki Tanaka, Naomasa Shiraishi, Shigeru Hirukawa | 2000-09-12 |
| 5808910 | Alignment method | Shigeru Hirukawa | 1998-09-15 |
| 5596204 | Method for aligning processing areas on a substrate with a predetermined position in a static coordinate system | Shigeru Hirukawa, Hiroki Tateno | 1997-01-21 |
| 5525808 | Alignment method and alignment apparatus with a statistic calculation using a plurality of weighted coordinate positions | Eiji Takane, Shigeru Hirukawa, Yoshichika Iwamoto, Ryoichi Kaneko | 1996-06-11 |