Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5525808 | Alignment method and alignment apparatus with a statistic calculation using a plurality of weighted coordinate positions | Nobuyuki Irie, Shigeru Hirukawa, Yoshichika Iwamoto, Ryoichi Kaneko | 1996-06-11 |
| 5475490 | Method of measuring a leveling plane | Shigeru Hirukawa | 1995-12-12 |
| 5408083 | Method of measuring the best focus position having a plurality of measuring mark images and a plurality of focus positions | Shigeru Hirukawa | 1995-04-18 |