Issued Patents All Time
Showing 1–25 of 107 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9760014 | Illumination optical apparatus and projection exposure apparatus | — | 2017-09-12 |
| 9423698 | Illumination optical apparatus and projection exposure apparatus | — | 2016-08-23 |
| 9423697 | Illumination optical apparatus and projection exposure apparatus | — | 2016-08-23 |
| 9244359 | Illumination optical apparatus and projection exposure apparatus | — | 2016-01-26 |
| 9146476 | Illumination optical apparatus and projection exposure apparatus | — | 2015-09-29 |
| 9140993 | Illumination optical apparatus and projection exposure apparatus | — | 2015-09-22 |
| 9140992 | Illumination optical apparatus and projection exposure apparatus | — | 2015-09-22 |
| 8440375 | Exposure method and electronic device manufacturing method | Tohru Kiuchi, Hideya Inoue | 2013-05-14 |
| 8431328 | Exposure method, method for manufacturing flat panel display substrate, and exposure apparatus | — | 2013-04-30 |
| 7884921 | Illumination optical apparatus, projection exposure apparatus, projection optical system, and device manufacturing method | Michio Noboru | 2011-02-08 |
| 7656504 | Projection exposure apparatus with luminous flux distribution | — | 2010-02-02 |
| 7432993 | Display device manufacturing method and display device | Masaomi Kameyama | 2008-10-07 |
| 7319508 | Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices | Yasuhiro Omura, Soichi Owa | 2008-01-15 |
| 7301605 | Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices | Yasuhiro Omura, Soichi Owa | 2007-11-27 |
| 7109508 | Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus | — | 2006-09-19 |
| 7053390 | Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus | — | 2006-05-30 |
| 7050148 | Optical unit, exposure apparatus, and device manufacturing method | — | 2006-05-23 |
| 7050149 | Exposure apparatus and exposure method | Soichi Owa, Takashi Aoki | 2006-05-23 |
| 6967710 | Projection exposure apparatus and method | — | 2005-11-22 |
| 6897942 | Projection exposure apparatus and method | — | 2005-05-24 |
| 6885433 | Projection exposure apparatus and method | — | 2005-04-26 |
| 6864959 | Projection exposure apparatus | Yuji Kudo | 2005-03-08 |
| 6850313 | Exposure method, exposure apparatus and its making method, device manufacturing method, and device | Jun Ishikawa, Hiroyuki Nagasaka | 2005-02-01 |
| 6844915 | Optical system and exposure apparatus provided with the optical system | Soichi Owa, Issey Tanaka, Yasuhiro Omura | 2005-01-18 |
| 6842221 | Exposure apparatus and exposure method, and device manufacturing method | — | 2005-01-11 |