Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8804095 | Exposure apparatus and device fabrication method | — | 2014-08-12 |
| 8558987 | Exposure apparatus and device fabrication method | — | 2013-10-15 |
| 8018570 | Exposure apparatus and device fabrication method | — | 2011-09-13 |
| 7916272 | Exposure apparatus and device fabrication method | — | 2011-03-29 |
| 7700459 | Method for producing electronic device and electronic device | Norio Kaneko, Yusuke Taki | 2010-04-20 |
| 7471371 | Exposure apparatus and device fabrication method | — | 2008-12-30 |
| 7432993 | Display device manufacturing method and display device | Naomasa Shiraishi | 2008-10-07 |
| RE39662 | Projection exposure apparatus | Kazuo Ushida, Takashi Mori | 2007-05-29 |
| 6249335 | Photo-mask and method of exposing and projection-exposing apparatus | Shigeru Hirukawa, Naomasa Shiraishi | 2001-06-19 |
| 5739898 | Exposure method and apparatus | Toshihiko Ozawa, Masaya Komatsu, Masato Shibuya, Hiroshi Ooki, Yoshifumi Tokoyoda | 1998-04-14 |
| 5703675 | Projection-exposing apparatus with deflecting grating member | Shigeru Hirukawa, Naomasa Shiraishi | 1997-12-30 |
| 5576801 | Projection exposure apparatus | Kazuo Ushida | 1996-11-19 |
| 5530518 | Projection exposure apparatus | Kazuo Ushida | 1996-06-25 |
| 5311362 | Projection exposure apparatus | Koichi Matsumoto, Kazuo Ushida, Hiroyuki Tsuchiya | 1994-05-10 |
| 4931830 | Projection exposure apparatus | Kyoichi Suwa, Kazuo Ushida, Takeshi Suto, Shigeru Hirukawa, Shinichi Nakamura | 1990-06-05 |
| 4715318 | Photochemical reaction apparatus | Koichi Matsumoto | 1987-12-29 |
| 4655162 | Semiconductor device manufacturing apparatus | — | 1987-04-07 |