Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578973 | Illumination optical assembly, exposure apparatus, and device manufacturing method | Hirohisa Tanaka, Shinichi Nakajima | 2020-03-03 |
| 10222293 | Optical characteristic measuring method, optical characteristic adjusting method, exposure apparatus, exposing method, and exposure apparatus manufacturing method by detecting a light amount of measuring light | Ayako Nakamura | 2019-03-05 |
| 9880765 | Copy processing management system and copy processing management method | Atsushi Sakai, Shingo Maeda | 2018-01-30 |
| 9513560 | Illumination optical assembly, exposure apparatus, and device manufacturing method | Hirohisa Tanaka, Shinichi Nakajima | 2016-12-06 |
| 8081378 | Microscope | Hisao Osawa, Yumiko Ouchi, Yasuo Yonezawa | 2011-12-20 |
| 6693704 | Wave surface aberration measurement device, wave surface aberration measurement method, and projection lens fabricated by the device and the method | Tomoya Noda | 2004-02-17 |
| 6583928 | Microscope | Yuji Kadomatsu, Katsumi Ogino | 2003-06-24 |
| 6500511 | Optical disc recycling method and recycled optical disc | Toshiyuki Kashiwagi | 2002-12-31 |
| 6400502 | Microscope | — | 2002-06-04 |
| 6291145 | Image formation method with photosensitive material | Tadayosi Kokubo, Kazuya Okamoto, Masato Shibuya, Soichi Owa | 2001-09-18 |
| 6081051 | Linear/rotary actuator and winding machine including same | Kazuyuki Kitazawa, Yutaka Takeuchi, Shigeto Murata | 2000-06-27 |
| 5902716 | Exposure method and apparatus | Soichi Owa, Kazuya Okamoto, Masato Shibuya | 1999-05-11 |
| 5851707 | Microlithography projection-exposure masks, and methods and apparatus employing same | Masato Shibuya, Kazuya Okamoto, Soichi Owa | 1998-12-22 |
| 5847812 | Projection exposure system and method | Masato Shibuya, Kazuya Okamoto, Soichi Owa | 1998-12-08 |
| 5764363 | Apparatus for observing a surface using polarized light | Yutaka Iwasaki, Jun Iwasaki, Tsuneyuki Hagiwara | 1998-06-09 |
| 5739898 | Exposure method and apparatus | Toshihiko Ozawa, Masaya Komatsu, Masato Shibuya, Masaomi Kameyama, Yoshifumi Tokoyoda | 1998-04-14 |
| 5694220 | Minute step measuring method | Yutaka Iwasaki, Jun Iwasaki | 1997-12-02 |
| 5636201 | Optical disk memory for recording reproducible information | — | 1997-06-03 |
| 5621532 | Laser scanning microscope utilizing detection of a far-field diffraction pattern with 2-dimensional detection | Tomoya Noda | 1997-04-15 |