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Illumination optical assembly, exposure apparatus, and device manufacturing method |
Hirohisa Tanaka, Shinichi Nakajima |
2020-03-03 |
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Optical characteristic measuring method, optical characteristic adjusting method, exposure apparatus, exposing method, and exposure apparatus manufacturing method by detecting a light amount of measuring light |
Ayako Nakamura |
2019-03-05 |
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Copy processing management system and copy processing management method |
Atsushi Sakai, Shingo Maeda |
2018-01-30 |
| 9513560 |
Illumination optical assembly, exposure apparatus, and device manufacturing method |
Hirohisa Tanaka, Shinichi Nakajima |
2016-12-06 |
| 8081378 |
Microscope |
Hisao Osawa, Yumiko Ouchi, Yasuo Yonezawa |
2011-12-20 |
| 6693704 |
Wave surface aberration measurement device, wave surface aberration measurement method, and projection lens fabricated by the device and the method |
Tomoya Noda |
2004-02-17 |
| 6583928 |
Microscope |
Yuji Kadomatsu, Katsumi Ogino |
2003-06-24 |
| 6500511 |
Optical disc recycling method and recycled optical disc |
Toshiyuki Kashiwagi |
2002-12-31 |
| 6400502 |
Microscope |
— |
2002-06-04 |
| 6291145 |
Image formation method with photosensitive material |
Tadayosi Kokubo, Kazuya Okamoto, Masato Shibuya, Soichi Owa |
2001-09-18 |
| 6081051 |
Linear/rotary actuator and winding machine including same |
Kazuyuki Kitazawa, Yutaka Takeuchi, Shigeto Murata |
2000-06-27 |
| 5902716 |
Exposure method and apparatus |
Soichi Owa, Kazuya Okamoto, Masato Shibuya |
1999-05-11 |
| 5851707 |
Microlithography projection-exposure masks, and methods and apparatus employing same |
Masato Shibuya, Kazuya Okamoto, Soichi Owa |
1998-12-22 |
| 5847812 |
Projection exposure system and method |
Masato Shibuya, Kazuya Okamoto, Soichi Owa |
1998-12-08 |
| 5764363 |
Apparatus for observing a surface using polarized light |
Yutaka Iwasaki, Jun Iwasaki, Tsuneyuki Hagiwara |
1998-06-09 |
| 5739898 |
Exposure method and apparatus |
Toshihiko Ozawa, Masaya Komatsu, Masato Shibuya, Masaomi Kameyama, Yoshifumi Tokoyoda |
1998-04-14 |
| 5694220 |
Minute step measuring method |
Yutaka Iwasaki, Jun Iwasaki |
1997-12-02 |
| 5636201 |
Optical disk memory for recording reproducible information |
— |
1997-06-03 |
| 5621532 |
Laser scanning microscope utilizing detection of a far-field diffraction pattern with 2-dimensional detection |
Tomoya Noda |
1997-04-15 |