Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662666 | Sub-field control of a lithographic process and associated apparatus | Rowin MEIJERINK, Putra SAPUTRA, Pieter Gerardus Jacobus SMORENBERG, Theo Wilhelmus Maria THIJSSEN, Khalid ELBATTAY +3 more | 2023-05-30 |
| 6610460 | Exposure method | Kyoichi Suwa, Kazuo Ushida | 2003-08-26 |
| 5739898 | Exposure method and apparatus | Toshihiko Ozawa, Masato Shibuya, Hiroshi Ooki, Masaomi Kameyama, Yoshifumi Tokoyoda | 1998-04-14 |
| 5682226 | Photomask, an exposure method and a projection exposure apparatus | Satoru Anzai | 1997-10-28 |
| 5592259 | Photomask, an exposure method and a projection exposure apparatus | Satoru Anzai | 1997-01-07 |
| 5508132 | Photo mask | — | 1996-04-16 |