Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662666 | Sub-field control of a lithographic process and associated apparatus | Rowin MEIJERINK, Putra SAPUTRA, Pieter Gerardus Jacobus SMORENBERG, Khalid ELBATTAY, Ma Su Su HLAING +3 more | 2023-05-30 |
| 11372338 | Method for evaluating control strategies in a semiconductor manufacturing process | Ivo Matteo Leonardus Weijden, Jeroen VAN DONGEN, Cornelis Johannes Henricus LAMBREGTS, Ruud Rudolphus Johannes Catharinus De Wit, Hans Marinus Struijs +5 more | 2022-06-28 |