Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662666 | Sub-field control of a lithographic process and associated apparatus | Rowin MEIJERINK, Pieter Gerardus Jacobus SMORENBERG, Theo Wilhelmus Maria THIJSSEN, Khalid ELBATTAY, Ma Su Su HLAING +3 more | 2023-05-30 |
| RE49142 | Lithographic apparatus and an object positioning system | Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs +4 more | 2022-07-19 |
| 9939738 | Lithographic apparatus and an object positioning system | Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs +4 more | 2018-04-10 |