Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11768441 | Method for controlling a manufacturing process and associated apparatuses | Peter Ten Berge, Steven E. Steen, Khalid ELBATTAY | 2023-09-26 |
| 11669017 | Method for controlling a manufacturing apparatus and associated apparatuses | Roy Werkman, Bijoy Rajasekharan, Lydia Marianna Vergaij-Huizer, Jochem Sebastiaan Wildenberg, Ronald Van Ittersum +3 more | 2023-06-06 |
| 11662666 | Sub-field control of a lithographic process and associated apparatus | Rowin MEIJERINK, Putra SAPUTRA, Theo Wilhelmus Maria THIJSSEN, Khalid ELBATTAY, Ma Su Su HLAING +3 more | 2023-05-30 |
| 11448973 | Computational metrology based correction and control | Manouk RIJPSTRA, Cornelis Johannes Henricus LAMBREGTS, Wim Tjibbo Tel, Sarathi ROY, Cédric Désiré Grouwstra +3 more | 2022-09-20 |