Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287584 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2025-04-29 |
| 11940740 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2024-03-26 |
| 11796920 | Method for controlling a manufacturing process and associated apparatuses | Hermanus Adrianus DILLEN, Fan Feng, Ronald Van Ittersum, Willem Louis VAN MIERLO, Koen Thuijs | 2023-10-24 |
| 11681231 | Selecting a set of locations associated with a measurement or feature on a substrate | Pierluigi FRISCO, Svetla Petrova Matova | 2023-06-20 |
| 11669017 | Method for controlling a manufacturing apparatus and associated apparatuses | Roy Werkman, Bijoy Rajasekharan, Lydia Marianna Vergaij-Huizer, Ronald Van Ittersum, Pieter Gerardus Jacobus SMORENBERG +3 more | 2023-06-06 |
| 11480884 | Method for optimization of a lithographic process | Everhardus Cornelis Mos, Erik Johannes Maria Wallerbos, Maurits Van Der Schaar, Frank Staals, Franciscus Hendricus Arnoldus Elich | 2022-10-25 |
| 11442367 | Optimizing a sequence of processes for manufacturing of product units | Marinus Jochemsen, Erik Weber Jensen, Erik Johannes Maria Wallerbos, Cornelis Johannes Rijnierse, Bijoy Rajasekharan +2 more | 2022-09-13 |
| 11435673 | Method of determining a set of metrology points on a substrate, associated apparatus and computer program | Kevin VAN DE RUIT, Roy Werkman | 2022-09-06 |
| 11385550 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2022-07-12 |
| 11378891 | Method for determining contribution to a fingerprint | Davit Harutyunyan, Fei Jia, Frank Staals, Fuming Wang, Hugo Thomas Looijestijn +8 more | 2022-07-05 |
| 11327406 | Estimating a parameter of a substrate | Svetla Petrova Matova, Roy Werkman, Luc Roumen | 2022-05-10 |
| 11300887 | Method to change an etch parameter | Richard Johannes Franciscus Van Haren, Victor Emanuel Calado, Leon Paul VAN DIJK, Roy Werkman, Everhardus Cornelis Mos +4 more | 2022-04-12 |
| 11294289 | Selecting a set of locations associated with a measurement or feature on a substrate | Pierluigi FRISCO, Svetla Petrova Matova | 2022-04-05 |
| 11170072 | Method and apparatus for inspection and metrology | Everhardus Cornelis Mos, Velislava IGNATOVA, Erik Weber Jensen, Michael Kubis, Hubertus Johannes Gertrudus Simons +2 more | 2021-11-09 |
| 11106141 | Optimizing a sequence of processes for manufacturing of product units | Marinus Jochemsen, Erik Weber Jensen, Erik Johannes Maria Wallerbos, Cornelis Johannes Rijnierse, Bijoy Rajasekharan +2 more | 2021-08-31 |
| 10928737 | Method for characterizing distortions in a lithographic process, lithographic apparatus, lithographic cell and computer program | Everhardus Cornelis Mos, Roy Werkman, Erik Johannes Maria Wallerbos | 2021-02-23 |
| 10816904 | Method for determining contribution to a fingerprint | Davit Harutyunyan, Fei Jia, Frank Staals, Fuming Wang, Hugo Thomas Looijestijn +8 more | 2020-10-27 |
| 10809631 | Method of monitoring and device manufacturing method | Everhardus Cornelis Mos, Marcel Hendrikus Maria Beems, Erik Johannes Maria Wallerbos | 2020-10-20 |
| 10802408 | Method for optimization of a lithographic process | Everhardus Cornelis Mos, Erik Johannes Maria Wallerbos, Maurits Van Der Schaar, Frank Staals, Franciscus Hendricus Arnoldus Elich | 2020-10-13 |
| 10725372 | Method and apparatus for reticle optimization | Wim Tjibbo Tel, Marinus Jochemsen, Frank Staals, Christopher PRENTICE, Laurent Michel Marcel Depre +3 more | 2020-07-28 |
| 10642162 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2020-05-05 |
| 10274834 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2019-04-30 |
| 9946165 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2018-04-17 |
| 9811006 | Method of determining a measurement subset of metrology points on a substrate, associated apparatus and computer program | Everhardus Cornelis Mos | 2017-11-07 |