Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11782349 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2023-10-10 |
| 11592753 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2023-02-28 |
| 11480884 | Method for optimization of a lithographic process | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Maurits Van Der Schaar, Frank Staals, Franciscus Hendricus Arnoldus Elich | 2022-10-25 |
| 11442367 | Optimizing a sequence of processes for manufacturing of product units | Jochem Sebastiaan Wildenberg, Marinus Jochemsen, Erik Weber Jensen, Cornelis Johannes Rijnierse, Bijoy Rajasekharan +2 more | 2022-09-13 |
| 11378891 | Method for determining contribution to a fingerprint | Davit Harutyunyan, Fei Jia, Frank Staals, Fuming Wang, Hugo Thomas Looijestijn +8 more | 2022-07-05 |
| 11327407 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2022-05-10 |
| 11170072 | Method and apparatus for inspection and metrology | Everhardus Cornelis Mos, Velislava IGNATOVA, Erik Weber Jensen, Michael Kubis, Hubertus Johannes Gertrudus Simons +2 more | 2021-11-09 |
| 11106141 | Optimizing a sequence of processes for manufacturing of product units | Jochem Sebastiaan Wildenberg, Marinus Jochemsen, Erik Weber Jensen, Cornelis Johannes Rijnierse, Bijoy Rajasekharan +2 more | 2021-08-31 |
| 10928737 | Method for characterizing distortions in a lithographic process, lithographic apparatus, lithographic cell and computer program | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Roy Werkman | 2021-02-23 |
| 10877381 | Methods of determining corrections for a patterning process | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2020-12-29 |
| 10816904 | Method for determining contribution to a fingerprint | Davit Harutyunyan, Fei Jia, Frank Staals, Fuming Wang, Hugo Thomas Looijestijn +8 more | 2020-10-27 |
| 10809631 | Method of monitoring and device manufacturing method | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Marcel Hendrikus Maria Beems | 2020-10-20 |
| 10802408 | Method for optimization of a lithographic process | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Maurits Van Der Schaar, Frank Staals, Franciscus Hendricus Arnoldus Elich | 2020-10-13 |