Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809631 | Method of monitoring and device manufacturing method | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Erik Johannes Maria Wallerbos | 2020-10-20 |
| 10527957 | Method and apparatus for processing a substrate in a lithographic apparatus | Cayetano Sanchez-Fabres Cobaleda, Franciscus Godefridus Casper Bijnen, Edo Maria Hulsebos, Arie Jeffrey Den Boef, Piotr Michał Stolarz | 2020-01-07 |
| 8593646 | Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Theodorus Petrus Maria Cadee, Raymond Wilhelmus Louis Lafarre | 2013-11-26 |
| 8514365 | Lithographic apparatus and device manufacturing method | Frederik Eduard De Jong, Marinus Aart Van Den Brink, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders, Leon Martin Levasier +10 more | 2013-08-20 |
| 7978339 | Lithographic apparatus temperature compensation | Tjarko Adriaan Rudolf Van Empel, Emiel Jozef Melanie Eussen | 2011-07-12 |
| 7474409 | Lithographic interferometer system with an absolute measurement subsystem and differential measurement subsystem and method thereof | Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch | 2009-01-06 |
| 7443511 | Integrated plane mirror and differential plane mirror interferometer system | Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch | 2008-10-28 |
| 7405811 | Lithographic apparatus and positioning apparatus | Joe Sakai | 2008-07-29 |
| 7352473 | Lithographic apparatus, device manufacturing method, and computer program | Johannes Mathias Theodorus Antonius Adriaens, Engelbertus Antonius Fransiscus Van Der Pasch | 2008-04-01 |
| 7349072 | Lithographic apparatus and device manufacturing method | Engelbertus Antonius Fransiscus Van Der Pasch | 2008-03-25 |
| 7349069 | Lithographic apparatus and positioning apparatus | Joe Sakai | 2008-03-25 |
| 7265366 | Lithographic apparatus and device manufacturing method | Engelbertus Antonius Fransiscus Van Der Pasch, Martinus Hendrikus Antonius Leenders | 2007-09-04 |
| 7177059 | Device and method for manipulation and routing of a metrology beam | Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Engelbertus Johannes Jeroen Klijntunte | 2007-02-13 |
| 6853440 | Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination | Engelbertus A. F. van de Pasch, Hendricus Johannes Maria Meijer, Daniel N. Galburt, Erik Roelof Loopstra | 2005-02-08 |
| 6747729 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition | Wouter Onno Pril, Philip D. Henshaw, Engelbertus A. F. van de Pasch | 2004-06-08 |
| 6570721 | Optomechanical mount for precisely steering/positioning a light beam | Kenneth J. Wayne, Jan W. Broenink, Englebertus A. F. van de Pasch | 2003-05-27 |
| 6536736 | Optomechanical mount for precisely steering/positioning a light beam | Kenneth J. Wayne, Jan W. Broenink, Englebertus A. F. van de Pasch | 2003-03-25 |