Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099306 | Method for controlling a lithographic system | Oscar Franciscus Jozephus Noordman, Antonius Theodorus Wilhelmus Kempen, Jan Bernard Plechelmus Van Schoot | 2024-09-24 |
| 12093632 | Machine learning based inverse optical proximity correction and process model calibration | Yu Cao, Yi Zou | 2024-09-17 |
| 11875966 | Method and apparatus for inspection | Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, Jozef Petrus Henricus Benschop, Erwin Paul SMAKMAN, Tamara Druzhinina +1 more | 2024-01-16 |
| 11544440 | Machine learning based inverse optical proximity correction and process model calibration | Yu Cao, Yi Zou | 2023-01-03 |
| 11094502 | Method and apparatus for inspection | Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, Jozef Petrus Henricus Benschop, Erwin Paul SMAKMAN, Tamara Druzhinina +1 more | 2021-08-17 |
| RE47943 | Dual stage lithographic apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Erik Roelof Loopstra | 2020-04-14 |
| 10268128 | Lithographic apparatus | Franciscus Johannes Joseph Janssen, Johannes Paul Marie De La Rosette, Edwin Cornelis Kadijk, Nicolas Lallemant, Jan Liefooghe +4 more | 2019-04-23 |
| RE46933 | Dual stage lithographic apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Erik Roelof Loopstra | 2018-07-03 |
| RE45576 | Dual stage lithographic apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Erik Roelof Loopstra | 2015-06-23 |
| 8514365 | Lithographic apparatus and device manufacturing method | Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders, Leon Martin Levasier +10 more | 2013-08-20 |
| RE44446 | Dual stage lithographic apparatus and device manufacturing method | Joezf Petrus Henricus Benschop, Erik Roelof Loopstra | 2013-08-20 |
| 8248583 | Lithographic apparatus and calibration method | Hans Butler, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst, Georgo Angelis +4 more | 2012-08-21 |
| RE43576 | Dual stage lithographic apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Erik Roelof Loopstra | 2012-08-14 |
| 7589818 | Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus | Johannes Catharinus Hubertus Mulkens, Erik Roelof Loopstra | 2009-09-15 |
| 7161659 | Dual stage lithographic apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Erik Roelof Loopstra | 2007-01-09 |
| 7046331 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Harm Rossing, Richard Alexander George | 2006-05-16 |
| 6239862 | Photolithographic apparatus | Johannes Catharinus Hubertus Mulkens, Johannes Christiaan Maria Jasper | 2001-05-29 |
| 6084673 | Lithographic apparatus for step-and-scan imaging of mask pattern with interferometer mirrors on the mask and wafer holders | Alexander Straaijer | 2000-07-04 |
| 6067146 | Photolithographic apparatus | Johannes Catharinus Hubertus Mulkens, Johannes Christiaan Maria Jasper | 2000-05-23 |
| 5801832 | Method of and device for repetitively imaging a mask pattern on a substrate using five measuring axes | — | 1998-09-01 |
| 5481362 | Apparatus for projecting a mask pattern on a substrate | Henk F. D. Linders, Stefan Wittekoek | 1996-01-02 |
| 5191200 | Imaging apparatus having a focus-error and/or tilt detection device | Jan Evert Van Der Werf, Henk F. D. Linders, Johannes Marcus Maria Beltman | 1993-03-02 |
| 5144363 | Apparatus for and method of projecting a mask pattern on a substrate | Stefan Wittekoek, Theodorus A. Fahner | 1992-09-01 |
| 5100237 | Apparatus for projecting a mask pattern on a substrate | Stefan Wittekoek | 1992-03-31 |
| 4746800 | Positioning device comprising a z-manipulator and a .theta.-manipulator | Jan Van Eijk, Johannes M. M. Van Kimmenade, Hubert A. M. Neilen | 1988-05-24 |