Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099306 | Method for controlling a lithographic system | Antonius Theodorus Wilhelmus Kempen, Jan Bernard Plechelmus Van Schoot, Marinus Aart Van Den Brink | 2024-09-24 |
| 10139618 | Multi-mirror array | Jan Horn, Stefan Tuerk, Ulrich Bihr | 2018-11-27 |
| 9835950 | Radiation source | Markus Franciscus Antonius Eurlings, Niek Antonius Jacobus Maria Kleemans, Antonius Johannes Josephus Van Dijsseldonk, Ramon Mark Hofstra, Tien Nang Pham +3 more | 2017-12-05 |
| 9645500 | Radiation source and lithographic apparatus | Markus Franciscus Antonius Eurlings | 2017-05-09 |
| 8625199 | Pulse modifier with adjustable etendue | Adel Joobeur, Paul Van Der Veen, Arun Mahadevan Venkataraman | 2014-01-07 |
| 8189173 | Polarization control apparatus and method | Marcel Janssens, Huibert Visser, Evert Nieuwkoop | 2012-05-29 |
| 8004770 | Pulse modifier with adjustable etendue | Adel Joobeur, Paul Van Der Veen, Arun Mahadevan Venkataraman | 2011-08-23 |
| 7924406 | Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels | Erik Roelof Loopstra, Arno Jan Bleeker, Heine Melle Mulder, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more | 2011-04-12 |
| 7898646 | Using an interferometer as a high speed variable attenuator | Justin Kreuzer, Henri Johannes Petrus Vink, Teunis Cornelis van den Dool, Daniel Pérez Calero | 2011-03-01 |
| 7826037 | Radiation beam pulse trimming | Huibert Visser, Henri Johannes Petrus Vink, Marcus Gerhardus Hendrikus Meijerink, Koenraad Remi André Maria Schreel, Cornelis Cornelia De Bruijn | 2010-11-02 |
| 7738079 | Radiation beam pulse trimming | Henri Johannes Petrus Vink, Huibert Visser | 2010-06-15 |
| 7683300 | Using an interferometer as a high speed variable attenuator | Justin Kreuzer | 2010-03-23 |
| 7671968 | Lithographic apparatus having masking parts and device manufacturing method | Erik Roelof Loopstra, Arno Jan Bleeker, Heine Melle Mulder, Timotheus Franciscus Sengers, Laurentius Catrinus Jorritsma +2 more | 2010-03-02 |
| 7626182 | Radiation pulse energy control system, lithographic apparatus and device manufacturing method | — | 2009-12-01 |
| 7453551 | Increasing pulse-to-pulse radiation beam uniformity | Erik Petrus Buurman | 2008-11-18 |
| 6455862 | Lithographic projection apparatus | Paul Van Der Veen | 2002-09-24 |